Method for improving vanadium dioxide phase change amplitude by regulating sputtering power

Abstract

The invention discloses a method for improving the vanadium dioxide phase change amplitude by regulating the sputtering power. A vanadium dioxide film is prepared through a mode combing magnetron sputtering with rapid thermal annealing, a metal vanadium film is prepared in a magnetron sputtering mode, the sputtering power in the sputtering process adopts multiple parameters between 40-160 W, meanwhile, in order to achieve the purpose of the same film thickness, the sputtering time is adjusted according to power parameters, then rapid oxidizing annealing is conducted in a rapid annealing furnace, deposition of the film and preparation of vanadium dioxide is separated in the whole preparation process, the process requirements for preparation and regulation are lowered, in addition, by setting the multi-power parameters in the sputtering process, the effect of regulating the microstructure of the vanadium dioxide film is achieved, and the purpose of regulating and improving the vanadium dioxide phase change amplitude is achieved. The phase change characteristics of the prepared vanadium dioxide film are researched through a four-probe meter, and the method which is simple in preparation process, easy to control and capable of regulating and improving the VO2 phase change amplitude is designed.

Description

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AI Technical Summary

Benefits of technology

This technology allows for easier manufacturing of stable vanadic acidic compounds with controlled properties by creating a layer on their surface that can be easily separated from other layers during processing or use.

Problems solved by technology

This patented technical solution described in the text discusss how reducing heat dissipated from electronic devices used within homes leads to improved air conditioned environments such as houses without compromising their safety measures like ventilation systems. To achieve optimal performance levels, intelligently controllable windows made up of multiple layers of transparent conductors called vanadic oxides must meet specific criteria set forth below: 1) High solar load demands cause vapor pressure inside rooms due to increased cooling demand compared to traditional windows, making them difficult to regulate properly. Therefore, a new approach is needed to create highly efficient greenhouse gas controlled windows capable of efficiently shading out near red wavelength regions while minimizing energy waste.

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