A mems microstructure four-axis vibration device with piezoelectric ceramics as the excitation source

A piezoelectric ceramic and vibration excitation device technology, applied in the field of MEMS microstructure four-axis vibration excitation device, can solve the problems of large parallelism error, inflexibility, increase in measurement result error, etc., and achieve accurate preload force data. , The adjustment process is smooth, and the effect of reducing the shear force

CN108217585BInactive Publication Date: 2019-11-22BOHAI UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2019-11-22
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a MEMS microstructure four-axis vibration device using piezoelectric ceramics as an excitation source, including a sleeve and a bottom plate, piezoelectric ceramics, a pressure sensor, upper and lower connecting blocks, elastic supports, and a MEMS microstructure; There is an annular top plate on the upper end of the sleeve, and the microstructure is set on the annular top plate through elastic supports; guide shafts are evenly distributed between the annular top plate and the bottom plate, and the lower connecting blocks are evenly distributed with guide arms and passed through the sleeve wall And sleeved on the guide shaft, a locking device is provided on the guide arm; spherical grooves and spherical protrusions are provided on the upper and lower connecting blocks; piezoelectric ceramics are sandwiched between the pressure sensor and the elastic support; the upper The outer edge of the coupling block is pushed into the outer wall of the sleeve through uniformly connected ball plungers. The device can apply different sizes of pre-tightening force to the piezoelectric ceramics, so that the obtained pre-tightening force measurement value is more accurate, and the adjustment process of compensating the parallelism error of the two working surfaces of the piezoelectric ceramics becomes smoother and smoother, which is convenient Test dynamic characteristic parameters.
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Description

technical field

[0001] The invention belongs to the technical field of micromechanical electronic systems, and in particular relates to a MEMS microstructure four-axis vibration excitation device using piezoelectric ceramics as an excitation source. Background technique

[0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content.

[0003] In order to test the dynamic characteristic parameters of the mi...

Examples

Embodiment Construction

[0041] Such as Figure 1 to Figure 8 As shown, the present invention relates to a MEMS microstructure four-axis vibration device using piezoelectric ceramics as an excitation source, including a hollow sleeve 1, and stacked piezoelectric ceramics 10, a pressure sensor and a pressure sensor are arranged in the sleeve 1. 11 and a movable base composed of an upper coupling block 13 and a lower coupling block 15, an elastic support 6 and a MEMS microstructure 4 are arranged on the sleeve 1.

[0042] An annular top plate 2 and a bottom plate 3 with equal outer diameters and larger than the outer diameter of the sleeve are respectively fixed by screws on the top and bottom of the sleeve 1 , and the MEMS microstructure 4 is mounted on the annular top plate 2 through elastic supports 6 . The elastic support includes a square base plate 602 and four support arms 601 uniformly distributed around the circumference, each support arm 601 is composed of a first connecting arm 6011, a second...