45results about How to "Accurate Preload Data" patented technology

The invention discloses a MEMS microstructure four-axis vibration device based on a base excitation method, which includes a sleeve and a bottom plate, piezoelectric ceramics, a pressure sensor, upper and lower coupling blocks, elastic supports and MEMS microstructures; The upper end is provided with an annular top plate, and the microstructure is set on the annular top plate through an elastic support; guide shafts are uniformly distributed between the annular top plate and the bottom plate, and the lower connecting block is evenly distributed with guide arms that are passed through the sleeve wall and set in the On the guide shaft, a locking device is provided on the guide arm; matching spherical grooves and spherical protrusions are respectively provided on the upper and lower connecting blocks; piezoelectric ceramics are sandwiched between the pressure sensor and the elastic support; the upper The outer edge of the coupling block is pushed into the inner wall of the sleeve through the ball plunger. The device can apply different sizes of pre-tightening force to the piezoelectric ceramics, so that the obtained pre-tightening force measurement value is more accurate, and the adjustment process of compensating the parallelism error of the two working surfaces of the piezoelectric ceramics becomes smoother and smoother, which is convenient Test dynamic characteristic parameters.

The invention discloses a three-axis vibration excitation device for dynamically loading MEMS microstructures, including sleeves, piezoelectric ceramics, pressure sensors, upper and lower coupling blocks, steel balls, elastic supports and MEMS microstructures ;Annular top plate and bottom plate are arranged at both ends of the sleeve, and the microstructure is set on the top plate through elastic supports; guide shafts are evenly distributed between the top plate and the bottom plate, and the lower connecting block is provided with a guide arm and is penetrated by the sleeve wall. Fitted on the guide shaft, locking devices are respectively provided on the guide arms; spherical grooves are respectively provided on the upper connecting block and the lower connecting block; piezoelectric ceramics are sandwiched between the pressure sensor and the elastic support; The outer edge of the upper coupling block is supported in the sleeve by the ball plunger connected with the connecting rod. The device can apply different sizes of pre-tightening force to the piezoelectric ceramics, so that the obtained pre-tightening force measurement value is more accurate, and the adjustment process of compensating the parallelism error of the two working surfaces of the piezoelectric ceramics becomes smoother and smoother, which is convenient Test dynamic characteristic parameters.

The invention discloses a MEMS microstructure four-axis dynamic loading device based on piezoelectric ceramics, which includes a sleeve, piezoelectric ceramics, a pressure sensor, upper and lower connecting blocks and MEMS microstructures; a support plate is arranged in the sleeve and the electric screw drive mechanism; the upper and lower connecting blocks are respectively provided with mutually matching spherical protrusions and spherical grooves; piezoelectric ceramics are clamped between the pressure sensor and the elastic support; the outer edge of the upper connecting block passes through The connecting rods evenly distributed on the circumference are connected with installation blocks, on which ball plungers are installed respectively, and the steel balls at the outer ends of the ball plungers are pushed into the rectangular grooves on the outer wall of the sleeve respectively. The device can flexibly apply different sizes of pre-tightening force to the piezoelectric ceramics, and at the same time make the measured value of the pre-tightening force more accurate, and can make the adjustment process of compensating the parallelism error of the two working surfaces of the piezoelectric ceramics smoother and smoother , can avoid the falling off of the micro-device used for testing, and is convenient for testing the dynamic characteristic parameters of the MEMS microstructure.

The invention discloses a MEMS microstructure four-axis base excitation device based on piezoelectric ceramics, which includes a sleeve, piezoelectric ceramics, a pressure sensor, an upper connection block, a steel ball, a lower connection block, an elastic support and a MEMS microstructure ;In the lower part of the sleeve, an electric screw drive mechanism is installed to drive the lower connecting block to move; on the opposite surfaces of the upper connecting block and the lower connecting block, there are respectively conical grooves and spherical grooves, piezoelectric ceramic clips The sleeve is held between the pressure sensor and the elastic support; guide shafts are evenly distributed along the circumference of the sleeve; sliding seats are respectively arranged on the guide shafts, and the upper coupling block and each sliding seat are respectively connected by tension springs. The device can apply different sizes of pre-tightening force to the stacked piezoelectric ceramics, and at the same time make the measured value of the pre-tightening force more accurate, and can make the adjustment process of compensating the parallelism error of the two working surfaces of the stacked piezoelectric ceramics more efficient. Smooth and smooth, it can avoid the falling off of the micro-device used in the test, and it is convenient to test the dynamic characteristic parameters.

The invention discloses a MEMS microstructure four-axis base excitation device driven by stacked piezoelectric ceramics, including sleeves, piezoelectric ceramics, pressure sensors, upper and lower connecting blocks, steel balls, elastic supports and MEMS microstructures. The structure; the two ends of the sleeve are respectively provided with an annular top plate and a bottom plate, and the microstructure is set on the annular top plate through an elastic support; there are guide shafts evenly distributed between the annular top plate and the bottom plate, and guide supports are evenly distributed on the outer edge of the lower connection block The arms are respectively passed through the sleeve wall and set on the guide shaft, and locking devices are respectively provided on the guide arms; conical grooves and spherical grooves are respectively provided on the upper coupling block and the lower coupling block; The piezoelectric ceramic is sandwiched between the pressure sensor and the elastic support. The device can apply different sizes of pre-tightening force to the stacked piezoelectric ceramics, and at the same time make the measured value of the pre-tightening force more accurate, and can make the adjustment process of compensating the parallelism error of the two working surfaces of the stacked piezoelectric ceramics more efficient. Smooth and smooth, easy to test dynamic characteristic parameters.

The invention discloses a three-axis vibration excitation device that can excite MEMS microstructures off-chip, including sleeves and bottom plates, piezoelectric ceramics, pressure sensors, upper and lower connecting blocks, steel balls, elastic supports and MEMS microstructures. Structure; there is an annular top plate on the upper end of the sleeve, and the microstructure is set on the annular top plate through elastic supports; there are guide shafts evenly distributed between the top and bottom plates, and the lower connecting blocks are uniformly distributed through the sleeve wall and set in the Guide arm on the guide shaft; spherical grooves and tapered grooves for holding steel balls are respectively arranged on the upper and lower connecting blocks, and tension springs are evenly distributed on the circumference between the upper and lower connecting blocks; piezoelectric ceramics It is sandwiched between the pressure sensor and the elastic support; locking devices are respectively provided on the guide arms. The device can apply different sizes of pre-tightening force to the piezoelectric ceramics, so that the obtained pre-tightening force measurement value is more accurate, and the adjustment process of compensating the parallelism error of the two working surfaces of the piezoelectric ceramics becomes smoother and smoother, which is convenient Test dynamic characteristic parameters.

The invention discloses a four-axis excitation device for testing the dynamic characteristics of MEMS microstructures, which includes a sleeve, piezoelectric ceramics, pressure sensors, upper and lower coupling blocks, steel balls and MEMS microstructures; inside the sleeve There is a support plate and an electric screw drive mechanism; a spherical groove and a tapered groove for holding steel balls are respectively arranged on the upper and lower connecting blocks; piezoelectric ceramics are clamped between the pressure sensor and the elastic support; An installation block is connected to the outer edge of the upper connection block through connecting rods uniformly distributed on the circumference, ball plungers are respectively installed on the installation blocks, and steel balls at the outer ends of the ball plunger are pushed into rectangular grooves on the outer wall of the sleeve respectively. The device can flexibly apply different sizes of pre-tightening force to the piezoelectric ceramics, and at the same time make the measured value of the pre-tightening force more accurate, and can make the adjustment process of compensating the parallelism error of the two working surfaces of the piezoelectric ceramics smoother and smoother , can avoid the falling off of the micro-device used for testing, and is convenient for testing the dynamic characteristic parameters of the MEMS microstructure.

The invention discloses a four-axis base excitation device for testing the dynamic characteristics of MEMS microstructures, which includes sleeves, stacked piezoelectric ceramics, pressure sensors, upper and lower connecting blocks, steel balls and MEMS microstructures; There is a support plate and an electric screw drive mechanism inside the cylinder; spherical grooves and conical grooves for holding steel balls are respectively arranged on the upper and lower connecting blocks; the stacked piezoelectric ceramics are clamped between the pressure sensor and the elastic support between the pieces; ball plungers are evenly distributed on the upper connection block, and the outer end of the ball plunger pushes into the rectangular groove on the inner wall of the sleeve. The device can flexibly apply different sizes of pre-tightening force to the stacked piezoelectric ceramics, and at the same time make the measured value of the pre-tightening force more accurate, and can make the adjustment process of compensating the parallelism error of the two working surfaces of the stacked piezoelectric ceramics easy. It is smoother and smoother, greatly reduces the shear force between the layers of the stacked piezoelectric ceramics, can avoid the falling off of the micro-device used for testing, and is convenient for testing the dynamic characteristic parameters of the MEMS microstructure.

The invention discloses a MEMS microstructure three-axis base excitation device based on piezoelectric ceramics, which includes a sleeve, piezoelectric ceramics, a pressure sensor, an upper connection block, a steel ball, a lower connection block, an elastic support and a MEMS microstructure ;In the lower part of the sleeve, an electric screw drive mechanism is installed to drive the lower connecting block to move; on the opposite surfaces of the upper connecting block and the lower connecting block, there are respectively conical grooves and spherical grooves, piezoelectric ceramic clips The sleeve is held between the pressure sensor and the elastic support; guide shafts are evenly distributed along the circumference of the sleeve; sliding seats are respectively arranged on the guide shafts, and the upper coupling block and each sliding seat are respectively connected by tension springs. The device can apply different sizes of pre-tightening force to the stacked piezoelectric ceramics, and at the same time make the measured value of the pre-tightening force more accurate, and can make the adjustment process of compensating the parallelism error of the two working surfaces of the stacked piezoelectric ceramics more efficient. Smooth and smooth, it can avoid the falling off of the micro-device used in the test, and it is convenient to test the dynamic characteristic parameters.

The invention discloses an MEMS micro-structure three-axis type excitation device driven by piezoelectric ceramics. The MEMS micro-structure three-axis excitation device comprises a sleeve, a stackedpiezoelectric ceramic, a pressure sensor, an upper connecting block, a lower connecting block and an MEMS micro structure; an annular top plate is arranged at the upper end of the sleeve, the MEMS micro-structure is installed on the annular top plate through the elastic supporting part.; the upper end of the lower connecting block is a hemispheric round head and abuts against the bottom surface ofthe upper connecting block; the piezoelectric ceramic is clamped between the pressure sensor and the elastic supporting piece; ball head plungers are uniformly distributed between the upper connecting block and the sleeve, and the inner ends of the ball head plungers are jacked into a sliding groove in the outer edge of the upper connecting block, and guide shafts are uniformly distributed between the annular top plate and the bottom plate. According to the device, pre-tightening force of different sizes can be applied to the stacked piezoelectric ceramics, the obtained pre-tightening force measurement value is more accurate, so that the adjustment process of the parallelism error of the two working surfaces of the stacked piezoelectric ceramic can be smoother, the shearing force of the layers of the stacked piezoelectric ceramics is reduced, and the dynamic characteristic parameters of the MEMS micro-structure can be tested conveniently.

The invention discloses a MEMS microstructure three-axis vibration device based on a base excitation method, which includes a sleeve, piezoelectric ceramics, a pressure sensor, upper and lower connecting blocks, elastic supports and a MEMS microstructure; The end is provided with an annular top plate and a bottom plate, and the microstructure is set on the annular top plate through an elastic support; guide shafts are evenly distributed between the annular top plate and the bottom plate, and the lower connecting block is provided with a guide arm and is passed through and sleeved by the sleeve wall. On the guide shaft, there are locking devices on the guide arm respectively; on the upper and lower coupling blocks, there are respectively provided spherical grooves and protrusions that cooperate with each other; piezoelectric ceramics are sandwiched between the pressure sensor and the elastic support ; The outer edge of the upper connection block is pushed into the inner wall of the sleeve through the ball plunger. The device can apply different sizes of pre-tightening force to the piezoelectric ceramics, so that the obtained pre-tightening force measurement value is more accurate, and the adjustment process of compensating the parallelism error of the two working surfaces of the piezoelectric ceramics becomes smoother and smoother, which is convenient Test dynamic characteristic parameters.

The invention discloses a MEMS microstructure three-axis base excitation device driven by stacked piezoelectric ceramics, including sleeves, piezoelectric ceramics, pressure sensors, upper and lower connecting blocks, steel balls, elastic supports and MEMS microstructures. Structure; the two ends of the sleeve are respectively provided with an annular top plate and a bottom plate, and the microstructure is set on the top plate through an elastic support; guide shafts are evenly distributed between the annular top plate and the bottom plate, and guide arms are evenly distributed on the outer edge of the lower connection block And they are respectively passed through the sleeve wall and set on the guide shaft, and locking devices are respectively provided on the guide arms; conical grooves and spherical grooves are respectively provided on the upper coupling block and the lower coupling block; The electroceramic is sandwiched between the pressure sensor and the elastic support. The device can apply different sizes of pre-tightening force to the stacked piezoelectric ceramics, and at the same time make the measured value of the pre-tightening force more accurate, and can make the adjustment process of compensating the parallelism error of the two working surfaces of the stacked piezoelectric ceramics more efficient. Smooth and smooth, easy to test dynamic characteristic parameters.

The invention discloses a MEMS microstructure four-axis vibration device using piezoelectric ceramics as an excitation source, including a sleeve and a bottom plate, piezoelectric ceramics, a pressure sensor, upper and lower connecting blocks, elastic supports, and a MEMS microstructure; There is an annular top plate on the upper end of the sleeve, and the microstructure is set on the annular top plate through elastic supports; guide shafts are evenly distributed between the annular top plate and the bottom plate, and the lower connecting blocks are evenly distributed with guide arms and passed through the sleeve wall And sleeved on the guide shaft, a locking device is provided on the guide arm; spherical grooves and spherical protrusions are provided on the upper and lower connecting blocks; piezoelectric ceramics are sandwiched between the pressure sensor and the elastic support; the upper The outer edge of the coupling block is pushed into the outer wall of the sleeve through uniformly connected ball plungers. The device can apply different sizes of pre-tightening force to the piezoelectric ceramics, so that the obtained pre-tightening force measurement value is more accurate, and the adjustment process of compensating the parallelism error of the two working surfaces of the piezoelectric ceramics becomes smoother and smoother, which is convenient Test dynamic characteristic parameters.

The invention discloses a four-axis excitation device capable of applying impact loads to MEMS microstructures, comprising a sleeve, stacked piezoelectric ceramics, pressure sensors, upper and lower coupling blocks and MEMS microstructures; The supporting plate and the electric screw drive mechanism connected to the lower connecting block; the upper and lower connecting blocks are respectively provided with mutually matching spherical protrusions and spherical grooves; stacked piezoelectric ceramics are clamped between the pressure sensor and the elastic support The upper connection block is evenly connected with ball plungers, and the outer ends of the ball plungers push into the rectangular grooves on the inner wall of the sleeve. The device can flexibly apply different sizes of pre-tightening force to the stacked piezoelectric ceramics, and at the same time make the measured value of the pre-tightening force more accurate, and can make the adjustment process of compensating the parallelism error of the two working surfaces of the stacked piezoelectric ceramics easy. It is smoother and smoother, greatly reduces the shear force between the layers of the stacked piezoelectric ceramics, can avoid the falling off of the micro-device used for testing, and is convenient for testing the dynamic characteristic parameters of the MEMS microstructure.

The invention discloses a four-axis excitation device capable of dynamically driving a MEMS microstructure, which includes a sleeve and a bottom plate, piezoelectric ceramics, a pressure sensor, upper and lower connecting blocks, elastic supports and a MEMS microstructure; There is a ring-shaped top plate, and the microstructure is set on the ring-shaped top plate through elastic supports; guide shafts are evenly distributed between the ring-shaped top plate and the bottom plate, and the lower connecting block is evenly distributed with guide arms, which are passed through the sleeve wall and sleeved on the guide shaft On the bottom surface of the upper connection block, a spherical protrusion is arranged at the center, and a tension spring is evenly distributed on the circumference between the bottom surface of the upper connection block and the guide arm of the lower connection block, and the spherical protrusion is elastically pressed on the lower connection block by the tension spring; The piezoelectric ceramic is sandwiched between the pressure sensor and the elastic support. The device can apply different sizes of pre-tightening force to the piezoelectric ceramics, so that the obtained pre-tightening force measurement value is more accurate, and the adjustment process of compensating the parallelism error of the two working surfaces of the piezoelectric ceramics becomes smoother and smoother, which is convenient Test dynamic characteristic parameters.

The invention discloses a MEMS microstructure three-axis dynamic loading device based on piezoelectric ceramics, which includes a sleeve, stacked piezoelectric ceramics, a pressure sensor, upper and lower connecting blocks and a MEMS microstructure; Support plate and electric screw drive mechanism; spherical protrusions and spherical grooves are respectively provided between the upper and lower connecting blocks; stacked piezoelectric ceramics are clamped between the pressure sensor and the elastic support; outside the upper connecting block The edge is connected with mounting blocks through connecting rods evenly distributed on the circumference, and ball plungers are respectively installed on the mounting blocks, and the steel balls at the outer ends of the ball plungers are pushed into the rectangular grooves on the outer wall of the sleeve. The device can more flexibly apply different sizes of pre-tightening force to the stacked piezoelectric ceramics, so that the obtained pre-tightening force measurement value is more accurate, and the adjustment process of compensating the parallelism error of the two working surfaces of the stacked piezoelectric ceramics can be changed. It is smoother and smoother, reducing the shear force between the layers of the stacked piezoelectric ceramics, and it is convenient to test the dynamic characteristic parameters of the MEMS microstructure.

The invention discloses a MEMS microstructure four-axis off-chip vibration device based on the inverse piezoelectric effect, which includes a sleeve, stacked piezoelectric ceramics, a pressure sensor, upper and lower connecting blocks and a MEMS microstructure; There is a support plate and an electric screw drive mechanism connected with the lower connecting block; the lower end of the upper connecting block is provided with a hemispherical round head and pressed on the lower connecting block; the piezoelectric ceramic is clamped between the pressure sensor and the elastic support; Between the upper connecting block and the sleeve, ball plungers are evenly distributed on the circumference, and the steel balls at the inner end of the ball plunger are pushed into the chute on the outer edge of the upper connecting block, and there are evenly distributed balls passing through the lower connecting block in the sleeve. guide shaft. The device can flexibly apply different sizes of pre-tightening force to the stacked piezoelectric ceramics, so that the measured value of the pre-tightening force is more accurate, and the adjustment process of compensating the parallelism error of the two working surfaces of the stacked piezoelectric ceramics becomes smoother and smoother. , reducing the shear force between the layers of the stacked piezoelectric ceramics, which is convenient for testing the dynamic characteristic parameters of the MEMS microstructure.