A four-axis vibration excitation device of mems microstructure based on the base excitation method
An excitation device and microstructure technology, applied in microstructure devices, microstructure technology, measuring devices, etc., can solve problems such as inaccurate preload or piezoelectric ceramic output force, inflexibility, and increased error in measurement results , to avoid the interference of the pressure sensor, smooth the adjustment process and reduce the shear force
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[0041] Such as Figure 1 to Figure 8 As shown, a MEMS microstructure four-axis vibration device based on the base excitation method that the present invention relates to includes a hollow sleeve 1, and a stacked piezoelectric ceramic 10, a pressure sensor 11 and a pressure sensor 11 are arranged in the sleeve 1 The movable base formed by the upper coupling block 13 and the lower coupling block 15 is provided with an elastic support 6 and a MEMS microstructure 4 on the sleeve 1 .
[0042] An annular top plate 2 and a bottom plate 3 with equal outer diameters are respectively fixed on the upper surface and the bottom surface of the sleeve 1 by screws, and the MEMS microstructure 4 is mounted on the annular top plate 2 through an elastic support 6 . The elastic support includes a square base plate 602 and four support arms 601 uniformly distributed around the circumference, each support arm 601 is composed of a first connecting arm 6011, a second connecting arm 6012, and a third ...
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