A mems microstructure three-axis excitation device driven by piezoelectric ceramics

Abstract

The invention discloses an MEMS micro-structure three-axis type excitation device driven by piezoelectric ceramics. The MEMS micro-structure three-axis excitation device comprises a sleeve, a stackedpiezoelectric ceramic, a pressure sensor, an upper connecting block, a lower connecting block and an MEMS micro structure; an annular top plate is arranged at the upper end of the sleeve, the MEMS micro-structure is installed on the annular top plate through the elastic supporting part.; the upper end of the lower connecting block is a hemispheric round head and abuts against the bottom surface ofthe upper connecting block; the piezoelectric ceramic is clamped between the pressure sensor and the elastic supporting piece; ball head plungers are uniformly distributed between the upper connecting block and the sleeve, and the inner ends of the ball head plungers are jacked into a sliding groove in the outer edge of the upper connecting block, and guide shafts are uniformly distributed between the annular top plate and the bottom plate. According to the device, pre-tightening force of different sizes can be applied to the stacked piezoelectric ceramics, the obtained pre-tightening force measurement value is more accurate, so that the adjustment process of the parallelism error of the two working surfaces of the stacked piezoelectric ceramic can be smoother, the shearing force of the layers of the stacked piezoelectric ceramics is reduced, and the dynamic characteristic parameters of the MEMS micro-structure can be tested conveniently.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, in particular to a MEMS microstructure three-axis excitation device driven by piezoelectric ceramics. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. [0003] In order to test the dynamic characteristic parameters of the microstructure, it is first necessary to ma...

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Problems solved by technology

[0006] 2. There is no direct connection between the upper connection block and the lower connection block and the sleeve, but are installed in the sleeve in turn by means of clearance fit. If the parallelism error of the two working surfaces of the stacked piezoelectric ceramics is large , there is not enough space to adjust the movable base structure;

[0007] 3. The pressure sensor is installed at the bottom of the lower connecting block. Since the movable base structure adjusts itself, there is a certain inclination between the bottom of the lower connecting block and the working surface of the piezoelectric ceramic, so the pre-tightening force measured by the pressure sensor Or the output force of piezoelectric ceramics is not accurate; in addition, if the movable base structure causes the upper coupling block or the lower coupling block to contact the sleeve after adjustment, the error of the measurement result will further increase;

[0009] 5. In this device, gaskets of different thicknesses are used to change the magnitude of the pre-tightening force applied to the stacked piezoelectric ceramics, which makes the adjustment process complicated and not flexible enough

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