A mems microstructure three-axis pedestal excitation device driven by stacked piezoelectric ceramics

Abstract

The invention discloses a MEMS microstructure three-axis base excitation device driven by stacked piezoelectric ceramics, including sleeves, piezoelectric ceramics, pressure sensors, upper and lower connecting blocks, steel balls, elastic supports and MEMS microstructures. Structure; the two ends of the sleeve are respectively provided with an annular top plate and a bottom plate, and the microstructure is set on the top plate through an elastic support; guide shafts are evenly distributed between the annular top plate and the bottom plate, and guide arms are evenly distributed on the outer edge of the lower connection block And they are respectively passed through the sleeve wall and set on the guide shaft, and locking devices are respectively provided on the guide arms; conical grooves and spherical grooves are respectively provided on the upper coupling block and the lower coupling block; The electroceramic is sandwiched between the pressure sensor and the elastic support. The device can apply different sizes of pre-tightening force to the stacked piezoelectric ceramics, and at the same time make the measured value of the pre-tightening force more accurate, and can make the adjustment process of compensating the parallelism error of the two working surfaces of the stacked piezoelectric ceramics more efficient. Smooth and smooth, easy to test dynamic characteristic parameters.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, in particular to a MEMS microstructure three-axis base excitation device driven by stacked piezoelectric ceramics. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. [0003] In order to test the dynamic characteristic parameters of the microstructure, it is first ne...

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Problems solved by technology

[0006] 2. There is no direct connection between the upper connection block and the lower connection block and the sleeve, but are installed in the sleeve in turn by means of clearance fit. If the parallelism error of the two working surfaces of the stacked piezoelectric ceramics is large , there is not enough space to adjust the movable base structure;

[0007] 3. The pressure sensor is installed at the bottom of the lower connecting block. Since the movable base structure adjusts itself, there is a certain inclination between the bottom of the lower connecting block and the working surface of the piezoelectric ceramic, so the pre-tightening force measured by the pressure sensor Or the output force of piezoelectric ceramics is not accurate; in addition, if the movable base structure causes the upper coupling block or the lower coupling block to contact the sleeve after adjustment, the error of the measurement result will further increase;

[0009] 5. In this device, gaskets of different thicknesses are used to change the magnitude of the pre-tightening force applied to the stacked piezoelectric ceramics, which makes the adjustment process complicated and not flexible enough

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