A mems microstructure three-axis pedestal excitation device driven by stacked piezoelectric ceramics

A piezoelectric ceramic drive and excitation device technology, which is applied in the direction of measuring devices, machine/structural component testing, vibration testing, etc., can solve problems such as inflexibility, complicated adjustment process, and increased error of measurement results, and achieve smooth adjustment process , accurate measurement value, and the effect of reducing shear force

CN108225701BInactive Publication Date: 2019-05-31BOHAI UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2019-05-31
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a MEMS microstructure three-axis base excitation device driven by stacked piezoelectric ceramics, including sleeves, piezoelectric ceramics, pressure sensors, upper and lower connecting blocks, steel balls, elastic supports and MEMS microstructures. Structure; the two ends of the sleeve are respectively provided with an annular top plate and a bottom plate, and the microstructure is set on the top plate through an elastic support; guide shafts are evenly distributed between the annular top plate and the bottom plate, and guide arms are evenly distributed on the outer edge of the lower connection block And they are respectively passed through the sleeve wall and set on the guide shaft, and locking devices are respectively provided on the guide arms; conical grooves and spherical grooves are respectively provided on the upper coupling block and the lower coupling block; The electroceramic is sandwiched between the pressure sensor and the elastic support. The device can apply different sizes of pre-tightening force to the stacked piezoelectric ceramics, and at the same time make the measured value of the pre-tightening force more accurate, and can make the adjustment process of compensating the parallelism error of the two working surfaces of the stacked piezoelectric ceramics more efficient. Smooth and smooth, easy to test dynamic characteristic parameters.
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Description

technical field

[0001] The invention belongs to the technical field of micromechanical electronic systems, in particular to a MEMS microstructure three-axis base excitation device driven by stacked piezoelectric ceramics. Background technique

[0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content.

[0003] In order to test the dynamic characteristic parameters of the microstructure, it is first ne...

Examples

Embodiment Construction

[0035] Such as Figure 1 to Figure 7 As shown, the present invention relates to a three-axis base excitation device for testing the dynamic characteristics of MEMS microstructures, comprising a hollow sleeve 1, in which a stacked piezoelectric ceramic 10, a pressure sensor 11 and A movable base composed of an upper coupling block 13 , a steel ball 14 and a lower coupling block 15 is provided with an elastic support 6 and a MEMS microstructure 4 on the sleeve 1 .

[0036] An annular top plate 2 and a bottom plate 3 are respectively fixed on the upper surface and the bottom surface of the sleeve 1 by screws, and the MEMS microstructure 4 is mounted on the annular top plate 2 through an elastic support 6 . Described elastic support member 6 is made of a cylindrical pressing piece 601 and three supporting pieces 602 that the circumference is evenly distributed on pressing piece 601 outer edge, and the thickness of described supporting piece 602 is less than the thickness of pressi...