MEMS microstructure four-axis base excitation device driven by stacked piezoelectric ceramics

Abstract

The invention discloses an MEMS microstructure four-axis base excitation device driven by stacked piezoelectric ceramics, comprising a sleeve, piezoelectric ceramic, a pressure sensor, upper and lowerconnecting blocks, a steel ball, an elastic supporting member and an MEMS microstructure, wherein an annular top plate and a bottom plate are arranged at both ends of the sleeve, and the microstructure is arranged on the annular top plate through the elastic supporting member; guiding shafts are uniformly arranged between the annular top plate and the bottom plate, guide supporting arms are uniformly distributed on the lower edge of the lower connecting block, are penetrated by the sleeve wall and are sheathed on the guiding shafts, and locking devices are respectively arranged on the guide supporting arms; conical grooves and spherical grooves are respectively formed in the upper and lower connecting blocks; and the piezoelectric ceramic is sandwiched between the pressure sensor and theelastic supporting member. The device can apply different pre-tightening forces to the piezoelectric ceramic, and meanwhile, the obtained pre-tightening force measurement value is more accurate, the adjustment process for compensating the parallelism error of two working surfaces of the piezoelectric ceramic can be smoother, and dynamic characteristic parameters can be conveniently tested.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, in particular to a MEMS microstructure four-axis base excitation device driven by stacked piezoelectric ceramics. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. [0003] In order to test the dynamic characteristic parameters of the microstructure, it is first nec...

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Problems solved by technology

[0006] 2. There is no direct connection between the upper connection block and the lower connection block and the sleeve, but are installed in the sleeve in turn by means of clearance fit. If the parallelism error of the two working surfaces of the stacked piezoelectric ceramics is large , there is not enough space to adjust the movable base structure;

[0007] 3. The pressure sensor is installed at the bottom of the lower connecting block. Since the movable base structure adjusts itself, there is a certain inclination between the bottom of the lower connecting block and the working surface of the piezoelectric ceramic, so the pre-tightening force measured by the pressure sensor Or the output force of piezoelectric ceramics is not accurate; in addition, if the movable base structure causes the upper coupling block or the lower coupling block to contact the sleeve after adjustment, the error of the measurement result will further increase;

[0009] 5. In this device, gaskets of different thicknesses are used to change the magnitude of the pre-tightening force applied to the stacked piezoelectric ceramics, which makes the adjustment process complicated and not flexible enough

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