Four-axis vibration excitation device for testing the dynamic characteristics of mems microstructures

Abstract

The invention discloses a four-axis excitation device for testing the dynamic characteristics of MEMS microstructures, which includes a sleeve, piezoelectric ceramics, pressure sensors, upper and lower coupling blocks, steel balls and MEMS microstructures; inside the sleeve There is a support plate and an electric screw drive mechanism; a spherical groove and a tapered groove for holding steel balls are respectively arranged on the upper and lower connecting blocks; piezoelectric ceramics are clamped between the pressure sensor and the elastic support; An installation block is connected to the outer edge of the upper connection block through connecting rods uniformly distributed on the circumference, ball plungers are respectively installed on the installation blocks, and steel balls at the outer ends of the ball plunger are pushed into rectangular grooves on the outer wall of the sleeve respectively. The device can flexibly apply different sizes of pre-tightening force to the piezoelectric ceramics, and at the same time make the measured value of the pre-tightening force more accurate, and can make the adjustment process of compensating the parallelism error of the two working surfaces of the piezoelectric ceramics smoother and smoother , can avoid the falling off of the micro-device used for testing, and is convenient for testing the dynamic characteristic parameters of the MEMS microstructure.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, and in particular relates to a four-axis vibration excitation device used for testing the dynamic characteristics of MEMS microstructures. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. [0003] In order to test the dynamic characteristic parameters of the micros...

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Problems solved by technology

[0005] 2. There is no direct connection between the upper connection block and the lower connection block and the sleeve, but are installed in the sleeve in turn by means of clearance fit. If the parallelism error of the two working surfaces of the stacked piezoelectric ceramics is large , there is not enough space to adjust the movable base structure;

[0006] 3. The pressure sensor is installed at the bottom of the lower connecting block. Since the movable base structure is self-adjusted, there is a certain inclination between the bottom of the lower connecting block and the working surface of the piezoelectric ceramic, so the pre-tightening force measured by the pressure sensor Or the output force of piezoelectric ceramics is not accurate; in addition, if the movable base structure causes the upper coupling block or the lower coupling block to contact the sleeve after adjustment, the error of the measurement result will further increase;

[0008] 5. In this device, gaskets of different thicknesses are used to change the magnitude of the pre-tightening force applied to the stacked piezoelectric ceramics, which leads to a complicated adjustment process and is not flexible enough

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