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Four-axis base excitation device for testing the dynamic characteristics of mems microstructures

A technology of dynamic characteristics and excitation device, which is applied in the direction of microstructure device, machine/structural component testing, vibration testing, etc., which can solve the problem of inaccurate preload or piezoelectric ceramic output force, inflexibility, and increase in measurement result error. and other problems, to avoid the interference of the pressure sensor, smooth the adjustment process, and reduce the shear force.

Inactive Publication Date: 2019-11-29
BOHAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] 2. There is no direct connection between the upper connection block and the lower connection block and the sleeve, but are installed in the sleeve in turn by means of clearance fit. If the parallelism error of the two working surfaces of the stacked piezoelectric ceramics is large , there is not enough space to adjust the movable base structure;
[0006] 3. The pressure sensor is installed at the bottom of the lower connecting block. Since the movable base structure is self-adjusted, there is a certain inclination between the bottom of the lower connecting block and the working surface of the piezoelectric ceramic, so the pre-tightening force measured by the pressure sensor Or the output force of piezoelectric ceramics is not accurate; in addition, if the movable base structure causes the upper coupling block or the lower coupling block to contact the sleeve after adjustment, the error of the measurement result will further increase;
[0008] 5. In this device, gaskets of different thicknesses are used to change the magnitude of the pre-tightening force applied to the stacked piezoelectric ceramics, which leads to a complicated adjustment process and is not flexible enough

Method used

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  • Four-axis base excitation device for testing the dynamic characteristics of mems microstructures
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  • Four-axis base excitation device for testing the dynamic characteristics of mems microstructures

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Embodiment Construction

[0041] Such as Figure 1 to Figure 8 As shown, the present invention relates to a four-axis base excitation device for testing the dynamic characteristics of MEMS microstructures, comprising a hollow sleeve 1, in which a stacked piezoelectric ceramic 10, a pressure sensor 11 and A movable base composed of an upper coupling block 13 , a steel ball 14 and a lower coupling block 15 is provided with an elastic support 6 and a MEMS microstructure 4 on the sleeve 1 .

[0042] An annular top plate 2 and a bottom plate 3 are respectively fixed by bolts on the top and bottom of the sleeve 1, and the MEMS microstructure 4 is installed on the annular top plate 2 through elastic supports 6; the elastic supports include a square substrate 602 and four The support arms 601 uniformly distributed on the circumference, each support arm 601 is composed of the first connecting arm 6011, the second connecting arm 6012, the third connecting arm 6013 and the fourth connecting arm 6014 which are ver...

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Abstract

The invention discloses a four-axis base excitation device for testing the dynamic characteristics of MEMS microstructures, which includes sleeves, stacked piezoelectric ceramics, pressure sensors, upper and lower connecting blocks, steel balls and MEMS microstructures; There is a support plate and an electric screw drive mechanism inside the cylinder; spherical grooves and conical grooves for holding steel balls are respectively arranged on the upper and lower connecting blocks; the stacked piezoelectric ceramics are clamped between the pressure sensor and the elastic support between the pieces; ball plungers are evenly distributed on the upper connection block, and the outer end of the ball plunger pushes into the rectangular groove on the inner wall of the sleeve. The device can flexibly apply different sizes of pre-tightening force to the stacked piezoelectric ceramics, and at the same time make the measured value of the pre-tightening force more accurate, and can make the adjustment process of compensating the parallelism error of the two working surfaces of the stacked piezoelectric ceramics easy. It is smoother and smoother, greatly reduces the shear force between the layers of the stacked piezoelectric ceramics, can avoid the falling off of the micro-device used for testing, and is convenient for testing the dynamic characteristic parameters of the MEMS microstructure.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, and in particular relates to a four-axis base excitation device for testing the dynamic characteristics of MEMS microstructures. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. [0003] In order to test the dynamic characteristic parameters of the microstructure, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M7/02
CPCB81C99/005
Inventor 佘东生王巍魏洪峰周建壮韩建群刘闯
Owner BOHAI UNIV
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