Four-axis base excitation device for testing the dynamic characteristics of mems microstructures
A technology of dynamic characteristics and excitation device, which is applied in the direction of microstructure device, machine/structural component testing, vibration testing, etc., which can solve the problem of inaccurate preload or piezoelectric ceramic output force, inflexibility, and increase in measurement result error. and other problems, to avoid the interference of the pressure sensor, smooth the adjustment process, and reduce the shear force.
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[0041] Such as Figure 1 to Figure 8 As shown, the present invention relates to a four-axis base excitation device for testing the dynamic characteristics of MEMS microstructures, comprising a hollow sleeve 1, in which a stacked piezoelectric ceramic 10, a pressure sensor 11 and A movable base composed of an upper coupling block 13 , a steel ball 14 and a lower coupling block 15 is provided with an elastic support 6 and a MEMS microstructure 4 on the sleeve 1 .
[0042] An annular top plate 2 and a bottom plate 3 are respectively fixed by bolts on the top and bottom of the sleeve 1, and the MEMS microstructure 4 is installed on the annular top plate 2 through elastic supports 6; the elastic supports include a square substrate 602 and four The support arms 601 uniformly distributed on the circumference, each support arm 601 is composed of the first connecting arm 6011, the second connecting arm 6012, the third connecting arm 6013 and the fourth connecting arm 6014 which are ver...
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