Four-axis base excitation device for testing the dynamic characteristics of mems microstructures

A technology of dynamic characteristics and excitation device, which is applied in the direction of microstructure device, machine/structural component testing, vibration testing, etc., which can solve the problem of inaccurate preload or piezoelectric ceramic output force, inflexibility, and increase in measurement result error. and other problems, to avoid the interference of the pressure sensor, smooth the adjustment process, and reduce the shear force.
CN108217587BInactive Publication Date: 2019-11-29BOHAI UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
BOHAI UNIV
Publication Date
2019-11-29
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a four-axis base excitation device for testing the dynamic characteristics of MEMS microstructures, which includes sleeves, stacked piezoelectric ceramics, pressure sensors, upper and lower connecting blocks, steel balls and MEMS microstructures; There is a support plate and an electric screw drive mechanism inside the cylinder; spherical grooves and conical grooves for holding steel balls are respectively arranged on the upper and lower connecting blocks; the stacked piezoelectric ceramics are clamped between the pressure sensor and the elastic support between the pieces; ball plungers are evenly distributed on the upper connection block, and the outer end of the ball plunger pushes into the rectangular groove on the inner wall of the sleeve. The device can flexibly apply different sizes of pre-tightening force to the stacked piezoelectric ceramics, and at the same time make the measured value of the pre-tightening force more accurate, and can make the adjustment process of compensating the parallelism error of the two working surfaces of the stacked piezoelectric ceramics easy. It is smoother and smoother, greatly reduces the shear force between the layers of the stacked piezoelectric ceramics, can avoid the falling off of the micro-device used for testing, and is convenient for testing the dynamic characteristic parameters of the MEMS microstructure.
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Description

technical field

[0001] The invention belongs to the technical field of micromechanical electronic systems, and in particular relates to a four-axis base excitation device for testing the dynamic characteristics of MEMS microstructures. Background technique

[0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content.

[0003] In order to test the dynamic characteristic parameters of the microstructure, ...

Claims

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