A three-axis dynamic loading device for mems microstructure based on piezoelectric ceramics
A piezoelectric ceramic, dynamic loading technology, applied in microstructure devices, microstructure technology, measurement devices, etc., can solve the problems of inflexibility, increased measurement result error, large parallelism error, etc., to achieve smooth adjustment process, Large adjustment space, reducing the effect of shear force
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[0037] Such as Figure 1 to Figure 5 As shown, a kind of MEMS microstructure three-axis type dynamic loading device based on piezoelectric ceramics that the present invention relates to comprises a hollow sleeve 1, is provided with stacked piezoelectric ceramics 10, pressure sensor 11 and by The movable base formed by the upper coupling block 13 and the lower coupling block 15 is provided with an elastic support 6 and a MEMS microstructure 4 on the sleeve 1 .
[0038] An annular top plate 2 and a bottom plate 3 are respectively fixed on the upper surface and the bottom surface of the sleeve 1 by bolts, and the MEMS microstructure 4 is mounted on the annular top plate 2 through an elastic support 6 . Described elastic support member 6 is made up of a cylindrical pressing piece 601 and three support arms 602 that the circumference is evenly distributed on pressing piece 601 outer edge, and wherein the thickness of supporting arm 602 is less than the thickness of pressing piece 6...
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