A mems microstructure three-axis base excitation device based on piezoelectric ceramics

Abstract

The invention discloses a MEMS microstructure three-axis base excitation device based on piezoelectric ceramics, which includes a sleeve, piezoelectric ceramics, a pressure sensor, an upper connection block, a steel ball, a lower connection block, an elastic support and a MEMS microstructure ;In the lower part of the sleeve, an electric screw drive mechanism is installed to drive the lower connecting block to move; on the opposite surfaces of the upper connecting block and the lower connecting block, there are respectively conical grooves and spherical grooves, piezoelectric ceramic clips The sleeve is held between the pressure sensor and the elastic support; guide shafts are evenly distributed along the circumference of the sleeve; sliding seats are respectively arranged on the guide shafts, and the upper coupling block and each sliding seat are respectively connected by tension springs. The device can apply different sizes of pre-tightening force to the stacked piezoelectric ceramics, and at the same time make the measured value of the pre-tightening force more accurate, and can make the adjustment process of compensating the parallelism error of the two working surfaces of the stacked piezoelectric ceramics more efficient. Smooth and smooth, it can avoid the falling off of the micro-device used in the test, and it is convenient to test the dynamic characteristic parameters.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, in particular to a MEMS microstructure three-axis base excitation device based on piezoelectric ceramics. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. [0003] In order to test the dynamic characteristic parameters of the microstructure, it is first necessary t...

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Problems solved by technology

[0006] 2. There is no direct connection between the upper connection block and the lower connection block and the sleeve, but are installed in the sleeve in turn by means of clearance fit. If the parallelism error of the two working surfaces of the stacked piezoelectric ceramics is large , there is not enough space to adjust the movable base structure;

[0007] 3. The pressure sensor is installed at the bottom of the lower connecting block. Since the movable base structure adjusts itself, there is a certain inclination between the bottom of the lower connecting block and the working surface of the piezoelectric ceramic, so the pre-tightening force measured by the pressure sensor Or the output force of piezoelectric ceramics is not accurate; in addition, if the movable base structure causes the upper coupling block or the lower coupling block to contact the sleeve after adjustment, the error of the measurement result will further increase;

[0009] 5. In this device, gaskets of different thicknesses are used to change the magnitude of the pre-tightening force applied to the stacked piezoelectric ceramics, which makes the adjustment process complicated and not flexible enough

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