MEMS (Micro-electromechanical System) microstructure tetra-axial base exciting device driven by stack piezoelectric ceramic

Abstract

The invention discloses an MEMS (Micro-electromechanical System) microstructure tetra-axial base exciting device driven by stack piezoelectric ceramic. The MEMS microstructure tetra-axial base exciting device comprises a sleeve, the stack piezoelectric ceramic, a pressure sensor, an upper connecting block, a lower connecting block and an MEMS microstructure, wherein a hemispherical head is arranged at the lower end of the upper connecting block and presses the lower connecting block; the piezoelectric ceramic is clamped between the pressure sensor and elastic supporting members; ball head plungers are uniformly distributed in the circumference between the upper connecting block and the sleeve; steel balls at the inner ends of the ball head plungers jack into a sliding chute in the outer edge of the upper connecting block; guiding shafts are uniformly distributed in the circumference between an annular top plate and a base plate; and guiding support arms which are uniformly distributedon the edge of the lower connecting block respectively penetrate through the sleeve and sleeve the corresponding guiding shafts. The device has the advantages that pretightening forces with differentstrengths can be applied to the stack piezoelectric ceramic, a pretightening force measurement value is more accurate, the adjusting process of compensating parallelism error between two working facesof the stack piezoelectric ceramic is enabled to smoother, and dynamic characteristic parameters are favorably tested.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, in particular to a MEMS microstructure four-axis excitation device driven by piezoelectric ceramics. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. [0003] In order to test the dynamic characteristic parameters of the microstructure, it is first necessary to mak...

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Problems solved by technology

[0006] 2. There is no direct connection between the upper connection block and the lower connection block and the sleeve, but are installed in the sleeve in turn by means of clearance fit. If the parallelism error of the two working surfaces of the stacked piezoelectric ceramics is large , there is not enough space to adjust the movable base structure;

[0007] 3. The pressure sensor is installed at the bottom of the lower connecting block. Since the movable base structure adjusts itself, there is a certain inclination between the bottom of the lower connecting block and the working surface of the piezoelectric ceramic, so the pre-tightening force measured by the pressure sensor Or the output force of piezoelectric ceramics is not accurate; in addition, if the movable base structure causes the upper coupling block or the lower coupling block to contact the sleeve after adjustment, the error of the measurement result will further increase;

[0009] 5. In this device, gaskets of different thicknesses are used to change the magnitude of the pre-tightening force applied to the stacked piezoelectric ceramics, which makes the adjustment process complicated and not flexible enough

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