Four-axis type piezoelectric ceramic excitation device for testing dynamic characteristics of MEMS microstructure

Abstract

The invention discloses a four-axis piezoelectric ceramic excitation device for testing the dynamic characteristics of an MEMS microstructure. The device comprises a sleeve, a bottom plate, a piezoelectric ceramic, a pressure sensor, an upper connecting block, a lower connecting block, a steel ball, an elastic supporting part and an MEMS microstructure. An annular top plate is arranged at the upper end of the sleeve. The microstructure is arranged on the annular top plate through the elastic supporting piece. Guide shafts are uniformly distributed between the annular top plate and the bottom plate. The lower connecting block is provided with guide supporting arms. The guide supporting arms penetrate through the wall of the sleeve to be sleeved on the guide shafts. Locking devices are arranged on the guide supporting arms respectively. Spherical grooves are formed in the upper connecting block and the lower connecting block respectively. The piezoelectric ceramic is clamped between thepressure sensor and the elastic supporting part. The outer edge of the upper connecting block is jacked into the inner wall of the sleeve through a ball head plunger. According to the device, pre-tightening forces of different sizes can be applied to the piezoelectric ceramic, and the obtained measurement values of pre-tightening forces are more accurate. As a result, the adjustment process for compensating the parallelism error between two working surfaces of the piezoelectric ceramic becomes more smooth and smoother. As a result, dynamic characteristic parameters can be conveniently tested.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, and in particular relates to a four-axis piezoelectric ceramic excitation device used for testing the dynamic characteristics of MEMS microstructures. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. [0003] In order to test the dynamic characteristic parameters o...

AI Technical Summary

Problems solved by technology

[0006] 2. There is no direct connection between the upper connection block and the lower connection block and the sleeve, but are installed in the sleeve in turn by means of clearance fit. If the parallelism error of the two working surfaces of the stacked piezoelectric ceramics is large , there is not enough space to adjust the movable base structure;

[0007] 3. The pressure sensor is installed at the bottom of the lower connecting block. Since the movable base structure adjusts itself, there is a certain inclination between the bottom of the lower connecting block and the working surface of the piezoelectric ceramic, so the pre-tightening force measured by the pressure sensor Or the output force of piezoelectric ceramics is not accurate; in addition, if the movable base structure causes the upper coupling block or the lower coupling block to contact the sleeve after adjustment, the error of the measurement result will further increase;

[0009] 5. In this device, gaskets of different thicknesses are used to change the magnitude of the pre-tightening force applied to the stacked piezoelectric ceramics, which makes the adjustment process complicated and not flexible enough

Images