A mems microstructure four-axis base excitation device based on piezoelectric ceramics
A technology of piezoelectric ceramics and excitation devices, which is applied in the direction of measuring devices, machine/structural component testing, vibration testing, etc., and can solve the problem of inaccurate pre-tightening force or output force of piezoelectric ceramics, inflexibility, and increased error in measurement results And other problems, to avoid the interference of the pressure sensor, the adjustment process is smooth, and the effect of reducing the shear force
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[0036] Such as Figure 1 to Figure 5 As shown, the present invention relates to a MEMS microstructure four-axis base excitation device based on piezoelectric ceramics, comprising a hollow sleeve 1, in which a stacked piezoelectric ceramics 10, a pressure sensor 11 and a The upper coupling block 13 , the steel ball 14 and the lower coupling block 15 form a movable base, and an elastic support 6 and a MEMS microstructure 4 are arranged on the sleeve 1 .
[0037] An annular top plate 2 and a bottom plate 3 are respectively fixed on the upper surface and the bottom surface of the sleeve 1 by bolts, and the MEMS microstructure 4 is mounted on the annular top plate 2 through an elastic support 6 . The elastic support includes a square base plate 602 and four support arms 601 uniformly distributed around the circumference, each support arm 601 is composed of a first connecting arm 6011, a second connecting arm 6012, and a third connecting arm 6013 which are vertically connected in se...
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