A mems microstructure four-axis excitation device driven by piezoelectric ceramics

Abstract

The invention discloses a MEMS microstructure four-axis excitation device driven by piezoelectric ceramics, comprising a sleeve, stacked piezoelectric ceramics, a pressure sensor, upper and lower connecting blocks and MEMS microstructures; the lower end of the upper connecting block is provided with The hemispherical round head is pressed on the lower connecting block; the piezoelectric ceramic is clamped between the pressure sensor and the elastic support; the ball plunger is evenly distributed on the circumference between the upper connecting block and the sleeve, and the inner end of the ball plunger The steel ball is pushed into the chute on the outer edge of the upper coupling block, and the guide shaft is evenly distributed on the circumference between the annular top plate and the bottom plate, and the guide arms evenly distributed on the outer edge of the lower coupling block are respectively passed through by the sleeve and set on the guide shaft. superior. The device can flexibly apply different sizes of pre-tightening force to the stacked piezoelectric ceramics, so that the measured value of the pre-tightening force is more accurate, and the adjustment process of compensating the parallelism error of the two working surfaces of the stacked piezoelectric ceramics becomes smoother and smoother. , reducing the shear force between the layers of the stacked piezoelectric ceramics, which is convenient for testing the dynamic characteristic parameters of the MEMS microstructure.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, in particular to a MEMS microstructure four-axis excitation device driven by piezoelectric ceramics. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. [0003] In order to test the dynamic characteristic parameters of the microstructure, it is first necessary to mak...

AI Technical Summary

Problems solved by technology

[0006] 2. There is no direct connection between the upper connection block and the lower connection block and the sleeve, but are installed in the sleeve in turn by means of clearance fit. If the parallelism error of the two working surfaces of the stacked piezoelectric ceramics is large , there is not enough space to adjust the movable base structure;

[0007] 3. The pressure sensor is installed at the bottom of the lower connecting block. Since the movable base structure adjusts itself, there is a certain inclination between the bottom of the lower connecting block and the working surface of the piezoelectric ceramic, so the pre-tightening force measured by the pressure sensor Or the output force of piezoelectric ceramics is not accurate; in addition, if the movable base structure causes the upper coupling block or the lower coupling block to contact the sleeve after adjustment, the error of the measurement result will further increase;

[0009] 5. In this device, gaskets of different thicknesses are used to change the magnitude of the pre-tightening force applied to the stacked piezoelectric ceramics, which makes the adjustment process complicated and not flexible enough

Images