MEMS microstructure three-axis excitation device with movable base structure

Abstract

The invention discloses an MEMS microstructure three-axis excitation device with a movable base structure. The MEMS microstructure three-axis excitation device comprises a sleeve, a bottom plate, piezoelectric ceramic, a pressure sensor, upper and lower connecting blocks, a steel ball, an elastic supporting member and an MEMS microstructure; an annular top plate is arranged at the upper end of thesleeve, and the microstructure is arranged on the annular top plate through the elastic supporting member; guiding shafts are uniformly arranged between the top plate and the bottom plate, and guidesupporting arms penetrating through the sleeve wall and sleeving the guiding shafts are uniformly distributed on the lower connecting block; spherical grooves are respectively formed in the upper andlower connecting blocks, and tension springs are uniformly arranged on a circumference between the upper and lower connecting blocks; the piezoelectric ceramic is sandwiched between the pressure sensor and the elastic supporting member; and an electric screw transmission mechanism connected with a lower connecting block via screw is arranged at the lower part in the sleeve. The device can apply different pre-tightening forces to the piezoelectric ceramic, and meanwhile, the obtained pre-tightening force measurement value is more accurate, the adjustment process for compensating the parallelismerror of two working surfaces of the piezoelectric ceramic can be smoother, and dynamic characteristic parameters can be conveniently tested.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, in particular to a MEMS microstructure three-axis excitation device with a movable base structure. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. [0003] In order to test the dynamic characteristic parameters of the microstructure, it is first necessary to make ...

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Problems solved by technology

[0006] 2. There is no direct connection between the upper connection block and the lower connection block and the sleeve, but are installed in the sleeve in turn by means of clearance fit. If the parallelism error of the two working surfaces of the stacked piezoelectric ceramics is large , there is not enough space to adjust the movable base structure;

[0007] 3. The pressure sensor is installed at the bottom of the lower connecting block. Since the movable base structure adjusts itself, there is a certain inclination between the bottom of the lower connecting block and the working surface of the piezoelectric ceramic, so the pre-tightening force measured by the pressure sensor Or the output force of piezoelectric ceramics is not accurate; in addition, if the movable base structure causes the upper coupling block or the lower coupling block to contact the sleeve after adjustment, the error of the measurement result will further increase;

[0009] 5. In this device, gaskets of different thicknesses are used to change the magnitude of the pre-tightening force applied to the stacked piezoelectric ceramics, which makes the adjustment process complicated and not flexible enough

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