A three-axis vibration excitation device for dynamic loading of mems microstructure
A dynamic loading and vibration excitation device technology, which is applied in the testing of machines/structural components, measuring devices, vibration testing, etc., can solve problems such as inflexibility, increased error in measurement results, large parallelism error, etc., and achieve the adjustment process Smooth, large adjustment space, and the effect of reducing shear force
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[0038] Such as Figure 1 to Figure 7 As shown, the present invention relates to a three-axis piezoelectric ceramic excitation device for testing the dynamic characteristics of MEMS microstructures, comprising a hollow sleeve 1, in which a stacked piezoelectric ceramic 10, a pressure sensor 11 and a movable base composed of an upper coupling block 13, a steel ball 14 and a lower coupling block 15, and an elastic support 6 and a MEMS microstructure 4 are arranged on the sleeve 1.
[0039] An annular top plate 2 and a bottom plate 3 are respectively fixed on the upper surface and the bottom surface of the sleeve 1 by screws, and the MEMS microstructure 4 is mounted on the annular top plate 2 through an elastic support 6 . Described elastic support member 6 is made of a cylindrical pressing piece 601 and three supporting pieces 602 that the circumference is evenly distributed on pressing piece 601 outer edge, and the thickness of described supporting piece 602 is less than the thi...
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