A four-axis excitation device that can load impact loads on mems microstructures
A technology of impact load and excitation device, which is used in the testing of machine/structural components, measuring devices, impact testing, etc., can solve the problems of large parallelism error, inflexibility, increase in measurement result error, etc., and achieve accurate preloading. Force data, smooth adjustment process, effect of reducing shear force
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[0040] Such as Figure 1 ~ Figure 7 As shown, the present invention relates to a four-axis excitation device that can load impact loads on MEMS microstructures. It includes a hollow sleeve 1 in which stacked piezoelectric ceramics 10, pressure sensors 11, and The movable base formed by the upper connecting block 13 and the lower connecting block 15 is provided with an elastic support 6 and a MEMS microstructure 4 on the sleeve 1.
[0041] An annular top plate 2 and a bottom plate 3 are respectively fixed on the upper and bottom surfaces of the sleeve 1 by bolts, and the MEMS microstructure 4 is mounted on the annular top plate 2 through an elastic support 6. The elastic support includes a square base plate 602 and four evenly distributed support arms 601. Each support arm 601 is composed of a first connecting arm 6011, a second connecting arm 6012, and a third connecting arm 6013 that are vertically connected to each other in turn. And the fourth connecting arm 6014, the four su...
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