MEMS microstructure four-axis type dynamic loading apparatus based on piezoelectric ceramics

Abstract

The invention discloses an MEMS microstructure four-axis type dynamic loading apparatus based on piezoelectric ceramics. The apparatus comprises a sleeve, the piezoelectric ceramics, a pressure sensor, upper and lower connection blocks, and an MEMS microstructure, a support plate and an electric leading screw transmission mechanism are arranged in the sleeve, the upper connection block and the lower connection block are respectively provided with a spherical projection and a spherical groove matched with each other, the piezoelectric ceramics are clamped between the pressure sensor and an elastic support member, an outer rim of the upper connection block is connected with installation blocks through connecting rods uniformly distributed in a circumferential manner, the installation blocksare respectively provided with bulb plungers, and steel balls at the outer ends of the bulb plungers are respectively ejected into rectangular grooves of an outer wall of the sleeve. According to theapparatus, different pre-tightening forces can be flexibly applied to the piezoelectric ceramics, obtained measuring values of the pre-tightening forces are more accurate, the adjusting process for compensating parallelism errors of two operating surfaces of the piezoelectric ceramics becomes more smooth, the falling of micro-devices for the test can be avoided, and the test of dynamic characteristic parameters of the MEMS microstructure is facilitated.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, and in particular relates to a MEMS microstructure four-axis dynamic loading device based on piezoelectric ceramics. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. [0003] In order to test the dynamic characteristic parameters of the microstructure, it is first ...

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Problems solved by technology

[0006] 2. There is no direct connection between the upper connection block and the lower connection block and the sleeve, but are installed in the sleeve in turn by means of clearance fit. If the parallelism error of the two working surfaces of the stacked piezoelectric ceramics is large , there is not enough space to adjust the movable base structure;

[0007] 3. The pressure sensor is installed at the bottom of the lower connecting block. Since the movable base structure adjusts itself, there is a certain inclination between the bottom of the lower connecting block and the working surface of the piezoelectric ceramic, so the pre-tightening force measured by the pressure sensor Or the output force of piezoelectric ceramics is not accurate; in addition, if the movable base structure causes the upper coupling block or the lower coupling block to contact the sleeve after adjustment, the error of the measurement result will further increase;

[0009] 5. In this device, gaskets of different thicknesses are used to change the magnitude of the pre-tightening force applied to the stacked piezoelectric ceramics, which makes the adjustment process complicated and not flexible enough

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