Four-axis excitation device capable of loading impact load on MEMS microstructure

Abstract

The invention discloses a four-axis excitation device capable of loading impact load on an MEMS microstructure. The four-axis excitation device comprises a sleeve, a stacked piezoelectric ceramic, a pressure sensor, an upper connecting block, a lower connecting block and an MEMS micro structure; wherein a supporting plate and an electric lead screw transmission mechanism connected with the lower connecting block are arranged in the sleeve; the upper connecting block and the lower connecting block are respectively provided with spherical protrusions and spherical grooves which are matched witheach other; the piezoelectric ceramic is clamped between the pressure sensor and the elastic supporting piece; and ball head plungers are uniformly distributed on the upper connecting block, and the outer ends of the ball head plungers are jacked into rectangular grooves in the inner wall of the sleeve. According to the device, pre-tightening force of different magnitudes can be flexibly applied to the stacked piezoelectric ceramics. Meanwhile, the obtained pre-tightening force measurement value is more accurate, so that the adjustment process for compensating the parallelism error of the twoworking surfaces of the stacked piezoelectric ceramic can be smoother, the shearing force between the layers of the stacked piezoelectric ceramics is greatly reduced, falling of micro-devices for testing can be avoided, and dynamic characteristic parameters of the MEMS micro-structures can be tested conveniently.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, in particular to a four-axis excitation device capable of loading impact loads on MEMS microstructures. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. [0003] In order to test the dynamic characteristic parameters of the microstructure, it is first necessary to ...

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Problems solved by technology

[0005] 2. There is no direct connection between the upper connection block and the lower connection block and the sleeve, but are installed in the sleeve in turn by means of clearance fit. If the parallelism error of the two working surfaces of the stacked piezoelectric ceramics is large , there is not enough space to adjust the movable base structure;

[0006] 3. The pressure sensor is installed at the bottom of the lower connecting block. Since the movable base structure is self-adjusted, there is a certain inclination between the bottom of the lower connecting block and the working surface of the piezoelectric ceramic, so the pre-tightening force measured by the pressure sensor Or the output force of piezoelectric ceramics is not accurate; in addition, if the movable base structure causes the upper coupling block or the lower coupling block to contact the sleeve after adjustment, the error of the measurement result will further increase;

[0008] 5. In this device, gaskets of different thicknesses are used to change the magnitude of the pre-tightening force applied to the stacked piezoelectric ceramics, which leads to a complicated adjustment process and is not flexible enough

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