MEMS micro-structure four-axis excitation device

Abstract

The invention discloses a MEMS micro-structure four-axis excitation device. The four-axis excitation device comprises a sleeve, a bottom plate, a piezoelectric ceramic, a pressure sensor, an upper connecting block, a lower connecting block, an elastic supporting part and an MEMS micro-structure; an annular top plate is arranged at the upper end of the sleeve, the micro-structure is arranged on theannular top plate through the elastic supporting part; guide shafts are uniformly distributed between the annular top plate and the bottom plate, and guide support arms are uniformly distributed on the lower connecting block and penetrate through the sleeve wall and sleeve the guide shafts, and a locking device is arranged on each guide support arm; the upper connecting block and the lower connecting block are provided with a spherical groove and a spherical bulge that are matched; the piezoelectric ceramic is clamped between the pressure sensor and the elastic supporting piece; and tension springs are uniformly and circumferentially connected between the bottom surface of the upper connecting block and the guide support arms of the lower connecting block. According to the device, pre-tightening force of different sizes can be applied to the piezoelectric ceramic, and the obtained pre-tightening force measurement value is more accurate, so that the adjustment process of the parallelism error of the two working surfaces of the compensation piezoelectric ceramic becomes smoother, and the dynamic characteristic parameters can be conveniently tested.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, and in particular relates to a MEMS microstructure four-axis excitation device. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. [0003] In order to test the dynamic characteristic parameters of the microstructure, it is first necessary to make the microstructure ...

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Problems solved by technology

[0006] 2. There is no direct connection between the upper connection block and the lower connection block and the sleeve, but are installed in the sleeve in turn by means of clearance fit. If the parallelism error of the two working surfaces of the stacked piezoelectric ceramics is large , there is not enough space to adjust the movable base structure;

[0007] 3. The pressure sensor is installed at the bottom of the lower connecting block. Since the movable base structure adjusts itself, there is a certain inclination between the bottom of the lower connecting block and the working surface of the piezoelectric ceramic, so the pre-tightening force measured by the pressure sensor Or the output force of piezoelectric ceramics is not accurate; in addition, if the movable base structure causes the upper coupling block or the lower coupling block to contact the sleeve after adjustment, the error of the measurement result will further increase;

[0009] 5. In this device, gaskets of different thicknesses are used to change the magnitude of the pre-tightening force applied to the stacked piezoelectric ceramics, which makes the adjustment process complicated and not flexible enough

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