A four-axis excitation device that can dynamically drive mems microstructures
An excitation device and microstructure technology, which is applied in the direction of microstructure device, microstructure technology, machine/structural component testing, etc., can solve the problem of inaccurate preload or piezoelectric ceramic output force, large parallelism error, insufficient Flexibility and other issues to achieve the effect of avoiding the interference of the pressure sensor, accurate pre-tightening force data, and smooth adjustment process
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0037] Such as Figure 1 to Figure 6 As shown, the present invention relates to a four-axis excitation device that can dynamically drive MEMS microstructures. The movable base formed by the block 13 and the lower connecting block 15 is provided with an elastic support 6 and a MEMS microstructure 4 on the sleeve 1 .
[0038] An annular top plate 2 and a bottom plate 3 with equal outer diameters are respectively fixed on the upper surface and the bottom surface of the sleeve 1 by screws, and the MEMS microstructure 4 is mounted on the annular top plate 2 through an elastic support 6 . The elastic support includes a square base plate 602 and four support arms 601 uniformly distributed around the circumference, each support arm 601 is composed of a first connecting arm 6011, a second connecting arm 6012, and a third connecting arm 6013 which are vertically connected in sequence. Composed of the fourth connecting arm 6014, the four supporting arms 601 are respectively connected to...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com