A four-axis dynamic loading device for mems microstructure based on piezoelectric ceramics
A piezoelectric ceramics and dynamic loading technology, which is applied in measurement devices, machine/structural component testing, vibration testing, etc. Large space, smooth adjustment process, and the effect of reducing shear force
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[0039] like Figure 1 to Figure 6 Shown, a kind of MEMS microstructure four-axis type dynamic loading device based on piezoelectric ceramics that the present invention relates to comprises a hollow sleeve 1, is provided with stacked piezoelectric ceramics 10, pressure sensor 11 and by The movable base formed by the upper coupling block 13 and the lower coupling block 15 is provided with an elastic support 6 and a MEMS microstructure 4 on the sleeve 1 .
[0040] An annular top plate 2 and a bottom plate 3 are respectively fixed on the upper surface and the bottom surface of the sleeve 1 by bolts, and the MEMS microstructure 4 is mounted on the annular top plate 2 through an elastic support 6 . The elastic support includes a square base plate 602 and four support arms 601 uniformly distributed around the circumference, each support arm 601 is composed of a first connecting arm 6011, a second connecting arm 6012, and a third connecting arm 6013 which are vertically connected in s...
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