A four-axis dynamic loading device for mems microstructure based on piezoelectric ceramics

A piezoelectric ceramics and dynamic loading technology, which is applied in measurement devices, machine/structural component testing, vibration testing, etc. Large space, smooth adjustment process, and the effect of reducing shear force
CN108181069BInactive Publication Date: 2019-11-12BOHAI UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
BOHAI UNIV
Publication Date
2019-11-12
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a MEMS microstructure four-axis dynamic loading device based on piezoelectric ceramics, which includes a sleeve, piezoelectric ceramics, a pressure sensor, upper and lower connecting blocks and MEMS microstructures; a support plate is arranged in the sleeve and the electric screw drive mechanism; the upper and lower connecting blocks are respectively provided with mutually matching spherical protrusions and spherical grooves; piezoelectric ceramics are clamped between the pressure sensor and the elastic support; the outer edge of the upper connecting block passes through The connecting rods evenly distributed on the circumference are connected with installation blocks, on which ball plungers are installed respectively, and the steel balls at the outer ends of the ball plungers are pushed into the rectangular grooves on the outer wall of the sleeve respectively. The device can flexibly apply different sizes of pre-tightening force to the piezoelectric ceramics, and at the same time make the measured value of the pre-tightening force more accurate, and can make the adjustment process of compensating the parallelism error of the two working surfaces of the piezoelectric ceramics smoother and smoother , can avoid the falling off of the micro-device used for testing, and is convenient for testing the dynamic characteristic parameters of the MEMS microstructure.
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Description

technical field

[0001] The invention belongs to the technical field of micromechanical electronic systems, and in particular relates to a MEMS microstructure four-axis dynamic loading device based on piezoelectric ceramics. Background technique

[0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content.

[0003] In order to test the dynamic characteristic parameters of the microstructure, it is first ...

Claims

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