Method and system for managing and controlling online defects

A defect and fatal defect technology, applied in the field of online defect control, can solve problems such as time-consuming, affecting production capacity, time-consuming, etc., to achieve the effect of improving product quality

Active Publication Date: 2018-07-03
SEMICON MFG INT (SHANGHAI) CORP +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

It takes a lot of time to find the root cause
Before that, it was necessary to manually restrict the suspected machine limits, which not only consumes time, but also affects production capacity
In addition, at present, for the control of defects, all products adopt a unified standard, which does not consider the inherent differences of online machines, nor the differences of different processes

Method used

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  • Method and system for managing and controlling online defects
  • Method and system for managing and controlling online defects
  • Method and system for managing and controlling online defects

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Embodiment Construction

[0020] In the following description, numerous specific details are given in order to provide a more thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without one or more of these details. In other examples, some technical features known in the art are not described in order to avoid confusion with the present invention.

[0021] It should be understood that the invention can be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

[0022] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the / the" are intended to include...

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Abstract

The invention provides a method and a system for managing and controlling online defects. The method comprises the steps of: defining online machine levels by analyzing historical data according to different process requirements, so that a machine with the highest level can be selected from machines for execution when implementing an online manufacturing process; monitoring the operating conditionof the selected machine and the actual production conditions of products on the selected machine when adopting the selected machine for implementing the online manufacturing process; and updating thehistorical data to be analyzed for defining the online machine levels based on the monitoring result, and updating or maintaining the level of the selected machine. The method and the system for managing and controlling the online defects provided by the invention define the machine levels according to different process requirements, preferentially select the machine with the highest level for production, simultaneously monitor the machine and the product production conditions, can detect the performance changes early and take improvement countermeasures timely, can effectively improve product quality, and can maximize the use of machine productivity.

Description

technical field [0001] The present invention relates to the technical field of semiconductors, in particular to a method and system for controlling defects on the line. Background technique [0002] In production, quality control is very critical. At present, for semiconductor companies, there are many low-yield cases every year, and some even reach the scrapping standard. However, the root cause needs to be checked in detail on the running records of every step of the line, which will consume a lot of time and energy, and will inevitably cause more impact on the product. Through the analysis of historical data, it is found that more than 90% of low yield cases are related to online defects. Therefore, the control of online defects is particularly important. [0003] Currently, online anomalies are only discovered after a case has occurred. It takes a lot of time to find the root cause. Before that, it was necessary to manually constrain the suspected machine limits, wh...

Claims

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Application Information

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IPC IPC(8): H01L21/67
CPCH01L21/67253H01L21/67276
Inventor 闫卫卫刘孜谦
Owner SEMICON MFG INT (SHANGHAI) CORP
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