Device and method for inspecting electronic component

A technology for electronic components and inspection devices, applied in the direction of single semiconductor device testing, etc., can solve problems such as time-consuming inspections

Active Publication Date: 2018-07-17
MURATA MFG CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In addition, in order to inspect electronic components in a predetermined temperature environment, it is conceivable to inspect electronic components in a closed inspection room that can maintain a temperature environment. , the temperature in the inspection room changes due to the opening of the gate, and it takes time to return to the specified temperature environment, and it takes time for the inspection as a whole

Method used

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  • Device and method for inspecting electronic component
  • Device and method for inspecting electronic component
  • Device and method for inspecting electronic component

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Embodiment Construction

[0038] Embodiments of the present invention will be described below. In the following description of the drawings, the same or similar components are denoted by the same or similar reference numerals. The drawings are illustrations, and the dimensions and shapes of each part are schematic structures, and should not be interpreted as limiting the technical scope of the invention of the present application as this embodiment.

[0039] figure 1 is an overall schematic view of an inspection device according to an embodiment of the present invention, figure 2 and image 3 It is a plan view and a cross-sectional view for explaining the inspection device. Figure 1 to Figure 3 The XYZ axes in the figure are common to each figure, the XY axis direction represents the horizontal direction, and the Z axis direction represents the vertical direction.

[0040] Below, refer to Figure 1 to Figure 4 , an inspection device for an electronic component according to one embodiment of the ...

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Abstract

The present invention is provided with: an inspection chamber (20) in which an electronic component W is inspected; a transport mechanism (22) provided inside the inspection chamber (20), said transport mechanism (22) transporting, for inspection purposes, the electronic component W supplied to the inspection chamber (20); a first dry gas supply part (50) for supplying dry gas to a first space (S1) in the inspection chamber (20), the first space (S1) being on one surface side of the transport mechanism (22); and a second dry gas supply part (52) for supplying dry gas to a second space (S2) inthe inspection chamber (20), the second space (S2) being on the other surface side of the transport mechanism (22). The first space (S1) is at least as wide as the second space (S2), and the pressureat which dry gas is supplied by the second dry gas supply part (52) is higher than the pressure at which dry gas is supplied by the first dry gas supply part (50).

Description

technical field [0001] The present invention relates to an inspection device and an inspection method of electronic components. Background technique [0002] Since electronic devices incorporating electronic components are used in various temperature environments, it is checked whether electronic components have desired electrical characteristics over a wide temperature range (see Patent Documents 1 to 3). In particular, since a piezoelectric vibration device using a crystal resonator or the like requires good frequency characteristics over a wide temperature range, inspection of such temperature characteristics is important. [0003] However, in conventional inspections of temperature characteristics, humid air may adversely affect electronic components, hinder accurate inspections, and impair reliability of electronic components. For example, when electronic components are inspected in a low-temperature state, dew condensation, frost, etc. may occur on the electronic comp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/26
CPCG01R31/26
Inventor 朝仓秀树藤田建豪菅野晶夫前泽信明
Owner MURATA MFG CO LTD
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