Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Micro electro mechanical piezoelectric ultrasonic transducer with V-shaped spring

A shape spring, voltage electric technology, applied in the field of piezoelectric ultrasonic transducers, can solve the problems of low bandwidth and sensitivity

Active Publication Date: 2018-07-20
ZHEJIANG UNIV
View PDF6 Cites 6 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The purpose of the present invention is to solve the problem of low bandwidth and sensitivity in the prior art, and provide a V-shaped spring (V-shaped Spring) Microcomputer voltage electric ultrasonic transducer

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Micro electro mechanical piezoelectric ultrasonic transducer with V-shaped spring
  • Micro electro mechanical piezoelectric ultrasonic transducer with V-shaped spring
  • Micro electro mechanical piezoelectric ultrasonic transducer with V-shaped spring

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0029] The present invention will be further elaborated and illustrated below in conjunction with the accompanying drawings and specific embodiments. The technical features of the various implementations in the present invention can be combined accordingly on the premise that there is no conflict with each other.

[0030] Such as Figure 1~3 As shown, a microcomputer piezoelectric ultrasonic transducer with a V-shaped spring mainly includes a substrate 4 , a bottom electrode 3 , a piezoelectric layer 2 and an upper electrode 1 . A groove-shaped cavity is selectively etched on the back of the substrate 4 to form an elastic structural layer 41 with a certain thickness on the front of the substrate 4, and the unetched part of the substrate 4 around the elastic structural layer 41 forms a fixed end (anchor end). The bottom electrode 3 , the piezoelectric layer 2 and the upper electrode 1 are sequentially stacked on the front of the elastic structural layer 41 from bottom to top, ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
Thicknessaaaaaaaaaa
Thicknessaaaaaaaaaa
Angleaaaaaaaaaa
Login to View More

Abstract

The invention discloses a micro electro mechanical piezoelectric ultrasonic transducer with a V-shaped spring. The transducer is provided with a substrate, a structure layer, a bottom electrode, a piezoelectric layer and a top electrode. According to the operating principle of the transducer, positive and inverse piezoelectric effects are used for achieving conversion from mechanical energy to electric energy or from electric energy to mechanical energy. On the structure layer of the transducer, the design that two zones with opposite vibrating diaphragm stress symbols are connected through the V-shaped spring is adopted, and the multistage stiffness characteristic of the V-shaped spring is used for achieving the broadband. Meanwhile, the V-shaped spring facilitates reduction of initial deformation of a vibrating diaphragm under the residual stress effect, and sensitivity of the transducer is improved.

Description

technical field [0001] The invention belongs to the field of transducers in the technical field of micro-electromechanical systems (MEMS), in particular to a piezoelectric ultrasonic transducer with large bandwidth and high sensitivity. Background technique [0002] Piezoelectric ultrasonic transducer is a device that can convert electrical energy into mechanical energy, and convert mechanical energy into electrical energy, which integrates sending and receiving ultrasonic waves. Traditional ultrasonic transducers are machined, which is bulky, high power consumption, and unfavorable for integration, and because of the mismatch between their acoustic impedance and traditional acoustic transmission media (air, water), their acoustic emission efficiency is low. The micro-electro-mechanical ultrasonic transducer processed by the micro-manufacturing process combined with the micro-electro-mechanical system technology effectively overcomes the above-mentioned shortcomings. Microe...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): B06B1/06
CPCB06B1/06
Inventor 谢金陈旭颖刘鑫鑫乐先浩陈冬阳
Owner ZHEJIANG UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com