GaN-based power device using carbon nanotube microchannel heat sink and preparation method thereof
A technology of carbon nanotubes and power devices, applied in the field of new structure and its preparation, can solve the problems of low reliability and poor heat dissipation effect, increase the heat dissipation area, improve thermal stability and long-term working reliability , Improve the cooling effect
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[0028] The invention relates to a novel flip-chip structure which adopts a CNT array radiator to improve the heat dissipation of an AlGaN / GaN high electron mobility transistor. In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0029] figure 1 A schematic diagram showing the epitaxial structure of a highly reliable AlGaN / GaN high electron mobility transistor according to an embodiment of the present invention, which includes the following parts:
[0030] [1]: Under the premise of knowing the conventional AlGaN / GaN device structure, the substrate material 1 of the chip is SiC, sapphire or Si material.
[0031] [2]: Under the premise of knowing the conventional AlGaN / GaN device structure, the GaN high-resistance buffer layer 2 of the epitaxial structure of the chip.
[0032] [3]...
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