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A pressure and measurement system technology, applied in the direction of measuring devices, measuring fluid pressure, instruments, etc., can solve problems such as adhesive difficulties and achieve high-precision assembly effects
Active Publication Date: 2018-08-03
EHNDRESS KHAUZER GMBKH KO KG
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[0009] However, the smaller the footprint of the rod or tubular base, the more difficult it is to introduce the adhesive in a sufficiently more precise meter into the correspondingly small groove
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[0061] Figures 1 to 3 The pressure measurement system of the present invention is shown. All illustrated pressure measurement systems comprise supports 1, 3, 5, bases 7, 9, 11 connected to the supports 1, 3, 5 and pressure sensors mounted on the free ends of the bases 7, 9, 11 13. The pressure sensor 13 is, for example, a so-called semiconductor pressure sensor using a pressure sensor chip made of silicon, and comprises, for example, a membrane platform 15 and a measuring membrane 17 arranged thereon, under which a pressure chamber 19 is closed.
[0062] The pressure measurement system can be implemented as a differential pressure measurement system, a relative pressure measurement system, or an absolute pressure measurement system.
[0063] In order to register the pressure difference, the first face of the measuring membrane 17 is supplied with a first pressure p 1 and the second side via - figure 1 Shown in dotted line - the pressure transfer line 21 is supplied with a...
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Abstract
The invention describes a pressure measuring device which can be produced in a simple manner and has a carrier (1, 3, 5), in particular a metal carrier (1, 3, 5), in particular a stainless steel carrier, a pedestal (7, 9, 11) connected to the carrier (1, 3, 5) and a pressure sensor (13) mounted on a free-standing end of the pedestal (7, 9, 11), the pressure sensor (13) of which is protected against thermomechanical stresses and is distinguished by the fact that the pedestal (7, 9, 11) comprises a base (25, 27, 29) arranged on the carrier (1, 3, 5), the pedestal (7, 9, 11) comprises an extension (31) which extends from the base (25, 27, 29) in the direction of the pressure sensor (13) and comprises the free-standing end of the pedestal (7, 9, 11), the base (25, 27, 29) has an area which isgreater than an area of the extension (31), and the extension (31) has an area which is smaller than an area of the pressure sensor (13) mounted thereon.
Description
technical field [0001] The invention relates to a pressure measurement system, which has a support (especially a metal support, especially a stainless steel support), a base connected to the support, and a free end mounted on the base pressure sensor. Background technique [0002] Pressure measuring systems are used for the metered recording of pressure, especially absolute pressure, relative pressure and differential pressure, and are used in industrial measurement technology. [0003] So-called semiconductor pressure sensors are frequently used in pressure measurement technology. In the prior art, semiconductor sensors are usually fabricated using silicon, for example by applying silicon-on-insulator (SOI) technology. They are designed, for example, as pressure sensor chips, which generally have a membrane platform and a measuring membrane arranged on the membrane platform. [0004] Such pressure sensors are very sensitive and are therefore usually inserted into a metal...
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