A fixture head for silicon wafer clamping
A jig and handpiece technology, which is applied to the field of the jig head for holding silicon wafers, can solve the problem of inaccurate holding of silicon wafers, etc., and achieve the effects of easy rotation angle, improved stability, and accurate rotation angle control.
Active Publication Date: 2020-12-18
SHANGHAI TUNA ELECTRIC MECHANIC EQUIP CO LTD
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Problems solved by technology
[0003] Aiming at the deficiencies in the prior art, the object of the present invention is to provide a fixture head for silicon wafer clamping, which is used to solve the problem of inaccurate clamping jaws on silicon wafers
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[0033] Example: such as figure 1 with figure 2As shown, a fixture head for silicon wafer clamping includes a machine base 1, a first driving block 2, a second driving block 3, a first connecting rod 4, a second connecting rod 5, a driving mechanism and a reset mechanism , the base 1 is provided with two driving rod piercing holes and two connecting rod piercing holes, the two connecting rod piercing holes are arranged between the two driving rod piercing holes, and the two connecting rod piercing holes A first drive rod 6 and a second drive rod 7 are respectively pierced in the driving rod piercing hole, and the first driving block 2 and the second driving block 3 are respectively arranged on the left side of the two driving rod piercing holes, and The first driving block 2 is fixedly connected to the left end of the first driving rod 6, the second driving block 3 is fixedly connected to the left end of the second driving rod 7, and the first connecting rod 4 and the second ...
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The invention discloses a clamp machine head for clamping silicon slices, and belongs to the technical field of silicon slice cleaning. The clamp machine head comprises a base, two driving rods and two connecting rods are arranged in the base in a penetrating manner, driving blocks are connected at the left ends of the two driving rods, the left diameters of the two connecting rods are gradually decreased, supporting parts are arranged on the two driving blocks and is closely pressed on the two connecting rods under the action of reset mechanisms, the right ends of the two connecting rods areconnected with driving mechanisms, the driving mechanisms drive the two connecting rods to bilaterally slide, the distances among the supporting parts and center lines of the connecting rods are changed under the action of the reset mechanisms to drive the two driving rods to rotate, and the rotating directions of the two driving rods are opposite. According to the clamp machine head, wide-distance motion of the connecting rods is transformed into change of the distances among the supporting parts and the center lines of the connecting rods, the rotating accuracy of the driving rods is controlled, the rotating accuracy of clamping jaws is controlled, and the silicon slices are accurately clamped by the clamping jaws.
Description
technical field [0001] The invention belongs to the technical field of silicon wafer cleaning, in particular to a fixture head for clamping silicon wafers. Background technique [0002] In the traditional silicon wafer cleaning technology, the silicon wafers are usually placed in the silicon wafer cleaning flower basket for cleaning, but the silicon wafer cleaning flower basket has a certain shielding effect on the silicon wafers, resulting in incomplete cleaning of the silicon wafers, so it is necessary to rely on clamping Claws hold the wafer. Because the silicon wafer is thin and has high precision, the jaws must hold the silicon wafer accurately when clamping the silicon wafer. If the jaws hold the silicon wafer too tightly, it is easy to cause damage to the silicon wafer. If the wafer is clamped too loosely, it is prone to loose clamping. Contents of the invention [0003] In view of the deficiencies in the prior art, the purpose of the present invention is to provi...
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IPC IPC(8): B08B13/00H01L21/67
CPCB08B13/00H01L21/6704
Inventor 丁高生葛林五陈景韶葛林新李杰
Owner SHANGHAI TUNA ELECTRIC MECHANIC EQUIP CO LTD