Two-degree-of-freedom piezoelectric driving device and excitation method thereof

A piezoelectric drive, degree of freedom technology, applied in the direction of piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., can solve the problems of high cost and small stroke, and achieve low cost , The structure is simple, the effect of overcoming the stroke

Active Publication Date: 2018-08-14
HARBIN INST OF TECH
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Problems solved by technology

[0004] In order to solve the technical problems of high cost and small stroke of the existing two-degree-of-freedom piezoelectric drive device, the present invention proposes a two-degree-of-freedom piezoelectric drive device and its excitation method

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  • Two-degree-of-freedom piezoelectric driving device and excitation method thereof
  • Two-degree-of-freedom piezoelectric driving device and excitation method thereof
  • Two-degree-of-freedom piezoelectric driving device and excitation method thereof

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Embodiment Construction

[0042] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0043] combine Figure 1-Figure 10 , the present invention proposes a two-degree-of-freedom piezoelectric drive device, including four sets of piezoelectric beams 1, a driving foot base 2, a driving foot 3 and a base body 4; the four sets of piezoelectric beams 1 include a piezoelectric beam-1 -6. Piezoelectric Beam Two 1-5, Piezoelectric Beam Three 1-4 and Piezoelectric Beam Four 1-3; and four groups of piezoelectric beams 1 have the same structur...

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Abstract

The invention provides a two-degree-of-freedom piezoelectric driving device and an excitation method thereof, and belongs to the field of piezoelectric driving. The two-degree-of-freedom piezoelectricdriving device comprises four groups of identical piezoelectric beams, a substrate, a driving foot base and a driving foot. The two-degree-of-freedom piezoelectric driving device is simple in structure, and easy to manufacture. Each piezoelectric beam comprises two piezoelectric ceramic pieces and a metal baseplate. When a voltage excitation signal is applied to the piezoelectric beams, bending motion of the piezoelectric beams along the thickness direction can be realized. Through design of the voltage excitation signal for the four groups of piezoelectric beams, the direction and time sequence of the bending motion of the piezoelectric beams are controlled, and the driving foot is excited to realize two-degree-of-freedom swinging. Furthermore, friction force is taken as driving force for driving a mover to realize two-degree-of-freedom motion. The two-degree-of-freedom piezoelectric driving device provided by the invention has the advantages of simple structure, low cost, high displacement resolution and large stroke, and has wide application prospects in the fields of ultra-precision driving, positioning and the like.

Description

technical field [0001] The invention belongs to the field of piezoelectric drive technology, in particular to a two-degree-of-freedom piezoelectric drive device and an excitation method thereof. Background technique [0002] In recent years, two-degree-of-freedom precision drive devices have played an increasingly important role in the fields of biomedicine, optical scanning, and high-precision intelligent processing. They are required to have the characteristics of high displacement resolution, simple structure, and large stroke. Piezoelectric drive technology uses the inverse piezoelectric effect to convert electrical energy into mechanical energy to achieve the purpose of driving. This technology has the advantages of high precision, no electromagnetic interference, and fast response; the two-degree-of-freedom piezoelectric drive device using piezoelectric drive technology has output displacement The advantages of high resolution, simple structure, and easy miniaturizatio...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/00H02N2/02H02N2/10
CPCH02N2/0015H02N2/0055H02N2/0075H02N2/0095H02N2/028H02N2/108
Inventor 刘英想邓杰陈维山刘军考
Owner HARBIN INST OF TECH
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