Etching solution concentration adjusting method

Abstract

The invention discloses an etching solution concentration adjusting method, comprising the steps that (1) liquid after the usage of the etching solution is recycled, obtaining the recycling liquid; (2) a concentration meter is adopted for concentration detection on all additives in the recycling liquid, obtaining the concentration of each additive; (3) the volume of the recycling liquid is detected by means of a liquid level meter, obtaining the volume of the recycling liquid; (4) the recycling liquid is added with adjusting solution having various additives, obtaining the target etching liquid, wherein the solvents of the additives are the same. The invention is advantageous in that after using the etching liquid, the adjusting solution is added, and through controlling the amount of theadjusting solution, the concentration of etching liquid can be recovered, and thereby the etching liquid can be recycled, pollution and cost can be reduced, and the amount of the adjusting solution added is very small.

Description

technical field [0001] The invention relates to the etching industry, in particular to a method for adjusting the concentration of etching solution. Background technique [0002] Most of the etching solutions currently used in the etching industry are mixtures of various substances. As time goes by during the etching process, the concentration of certain substances in the etching solution will decrease to varying degrees, which will eventually lead to a decrease in the etching rate. When the etching rate drops to a certain level, the etching solution can no longer be used. The nature of the etching solution itself is highly corrosive, even highly toxic, and the used etching solution cannot be discharged directly, otherwise it will cause serious pollution. At present, there are generally two methods for treating the used etching solution. One is to send it to a professional treatment plant for harmless treatment, and the other is to recycle it by a professional chemical sup...

AI Technical Summary

Problems solved by technology

Etching solution itself is highly corrosive, even highly toxic. After use, the etching solution cannot be discharged directly, otherwise it will cause serious pollution

At present, there are generally two methods for treating the used etching solution. One is to send it to a professional treatment plant for harmless treatment, and the other is to recycle it by a professional chemical supply plant. The above two methods will generate additional costs. increased business costs