Light box structure and optical detection equipment using same

Abstract

The invention relates to a light box structure, optical detection equipment using the same, and an optical detection module used for detecting a panel. The light box structure is characterized in thatat least one optical module is arranged on a stand; the optical modules include a light box structure and an image sensor which are arranged in a same-side and equal-angle manner, wherein the light box structure consists of a box body in which a light source is arranged; the box body has an incoming channel corresponding to a light source and a reflection channel at the same angle as the incomingchannel. Thus, with the incoming channel and the reflection channel of the light box structure, only primary reflection light of a detected surface in reflection light reflected by a detected objectcan be received by the image sensor for imaging and secondary reflection light or reflection light of the third time and above of a non-detected surface are effectively filtered, so that images of anupper surface and a lower surface do not interfere with each other, various kinds of contaminants, sizes and position can be effectively detected and the detection rate is increased.

Description

technical field [0001] The invention relates to the technical field of optical detection, in particular to a light box structure capable of filtering out unnecessary reflected light and an optical detection device using it, especially capable of solving the detection problem of mutual interference between surfaces on both sides of a transparent plate, and at the same time Accurately determine the size, location and type of pollutants, and reduce the overall cost of equipment. Background technique [0002] Affected by the rapid development of science and technology in recent years, various electronic products are increasingly required to be miniaturized, which makes the wire diameter of integrated circuits in the semiconductor manufacturing process smaller and smaller. At present, it has developed to below 10 nanometers. Therefore, any Contaminants may directly affect the relative manufacturing process or product qualification rate. Take the mask (Mask) used for the wafer (W...

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Problems solved by technology

[0003] However, the problem of photomask contamination has always existed, whether it is the surface of the non-patterned side of the photomask or the surface of the mask pellicle on the other side, these pollutants include particles, crystals, oil stains or glass surfaces attached to the surface fogging, fingerprints, etc., if this kind of contaminated photomask is used in the yellow light lithography process, it will directly take these pollution as part of the pattern and form on the photomask photoresist, which will further affect the formation of the integrated circuit Defective products, thereby reducing the product qualification rate

However, the photomask is usually made of a transparent and flat quartz sheet or glass sheet, which is difficult to focus during optical scanning, so it is difficult to detect flat pollutants such as fogging, fingerprints, cracks, etc., so its Detect scans are slow

In addition, it still has part of the problem of ghosting on the upper and lower surfaces, so that the size of the detected dust can only reach 50um*50um. For smaller dust, the detection ability is quite limited, and it is gradually unable to meet the requirements. The fine dust detection requirements of existing integrated circuit wire diameters are getting smaller and smaller

In addition, because it is mainly based on beam scanning, it is difficult to form a complete mask surface, so it is difficult for the inspection equipment to remember the position of the dust, so that it is impossible for the operator to directly move the optical module to the dust after inspection. Manual interpretation at the top cannot be used as the basis for judging the cause of subsequent production abnormalities

[0008] In other words, with the existing inspection methods or equipment for transparent plates, it is not only easy to misjudge the size of pollutants, but also the detection speed is slow, and at the same time, the ability to detect finer dust and surface pollutants is limited, which affects the overall The qualification rate and efficiency of the manufacturing process, how to solve the aforementioned problems is an important issue in the industry

[0009] Therefore, the inventor of this case made an in-depth discussion on the problems faced by the above-mentioned existing transparent board when detecting surface pollutants, and based on the inventor’s years of experience in related development, he invented a light box structure and an optical detection device using it. In order to overcome the troubles and inconveniences caused by the ghosting of transparent plates in the prior art

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