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Self-calibration for mirror positioning in optical mems interferometers

A mirror and interferometer technology, applied in the field of spectroscopy and interferometry, can solve the problems of increasing the size, cost and complexity of the interferometer system

Active Publication Date: 2020-10-13
SI WARE SYST INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, introducing bulky laser sources and additional interferometers increases the size, cost and complexity of the interferometer system

Method used

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  • Self-calibration for mirror positioning in optical mems interferometers
  • Self-calibration for mirror positioning in optical mems interferometers
  • Self-calibration for mirror positioning in optical mems interferometers

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Embodiment Construction

[0040] According to an embodiment of the present disclosure, a self-calibration technique is provided to correct the position of a movable mirror in microelectromechanical systems (MEMS) applications, such as interferometer / spectrometer applications. This technique enables the integration of interferometer / spectrometer systems on small chips and reduces system cost and complexity.

[0041] now refer to figure 1, illustrates an exemplary MEMS device 100 according to an embodiment of the present disclosure. The MEMS device 100 includes a MEMS actuator 110 and a movable mirror 120 . MEMS actuator 110 is an electrostatic actuator, such as a comb drive actuator, parallel plate actuator, or other type of electrostatic actuator. The movable mirror 120 is coupled to the MEMS actuator 110 such that movement of the MEMS actuator causes a displacement of the position of the movable mirror 120 .

[0042] In many MEMS applications, it is necessary to know the position of the movable mi...

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PUM

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Abstract

A microelectromechanical system (MEMS) device provides self-calibration of the mirror positioning of the movable mirror of the interferometer. At least one mirror in the MEMS device includes a non-planar surface. The movable mirror is coupled to a MEMS actuator with variable capacitance. A MEMS device includes a capacitance sensing circuit for determining capacitance of the MEMS actuator at a plurality of reference locations of a movable mirror, the plurality of reference locations corresponding to those generated by an interferometer based on the non-planar surface The interferogram of the central burst and one or more secondary bursts. The calibration module uses the actuator capacitance at the reference position to compensate for any drift in the capacitive sensing circuit.

Description

[0001] Cross References to Related Patents [0002] This U.S. patent application claims priority under 35 U.S.C. § 119(e) to the following U.S. Provisional Patent Application, which is hereby incorporated by reference in its entirety and made hereto for all purposes as this U.S. Part of the patent application: [0003] 1. Pending U.S. Provisional Application Serial No. 62 / 269,866, filed December 18, 2015, entitled "Self Calibration for Mirror Positioning in Optical MEMS Interferometers" (Attorney Docket No. SIWA-1007PROV3). [0004] This U.S. patent application also claims priority as a continuation-in-part (CIP) under 35 U.S.C. Part of this U.S. patent application: [0005] 1. Pending U.S. Patent Application Serial No. 14 / 165,997, filed January 28, 2014, entitled "Self Calibration for Mirror Positioning in Optical MEMS Interferometers," (Attorney Docket No. BASS01-00017I1), pursuant to 35 U.S.C. Section 120 claims priority as a continuation-in-part (CIP) to the following U....

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J3/06G01B9/02G01J3/453
CPCG01B9/02051G01B9/02068G01J3/06G01J3/4532G01J3/4535G01J2003/2879
Inventor M·安瓦尔M·梅德哈特B·莫塔达A·O·埃尔沙特M·加德西夫M·纳吉B·A·萨达尼A·N·哈菲兹
Owner SI WARE SYST INC