Semiconductor exhaust gas purifying equipment

A waste gas purification and semiconductor technology, which is applied in chemical instruments and methods, combined devices, and separation of dispersed particles, can solve problems such as environmental impact, dust pollution to equipment, and surrounding environmental pollution.

Pending Publication Date: 2018-10-09
安徽京仪自动化装备技术有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, the traditional semiconductor exhaust gas purification equipment cannot effectively collect and separate the dust contained in the exhaust gas, causing the dust to po

Method used

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  • Semiconductor exhaust gas purifying equipment
  • Semiconductor exhaust gas purifying equipment

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Embodiment Construction

[0019] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0020] like Figure 1-2 As shown, the embodiment of the present invention provides a semiconductor waste gas purification equipment, including a dust collector 1, a controller is fixedly installed on the left outer surface of the dust collector 1 near the lower position, and the output end of the controller is connected with the input end of the dust concentration sensor 12 Electrically connected, the left outer surface of the dust collector 1 is connected to ...

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Abstract

The invention provides a semiconductor exhaust gas purifying equipment, and belongs to the technical field of exhaust gas purifying equipment. The semiconductor exhaust gas purifying equipment comprises a deduster; a first gas inlet is communicated with a part of the deduster on the left side external surface close to the upper part of the deduster; the external surface of the first gas inlet is fixedly provided with a first gas pump; a water accumulating tank is fixedly arranged at the internal bottom of the deduster; a dust filtering screen is movably arranged in the water accumulating tank;a water tank is fixedly arranged on the top end of the deduster; filter membrane is fixedly arranged in the water tank; the left side of the water tank is fixedly provided with a first water pump; abackflow pipe is arranged between the water tank and the water accumulating tank. The semiconductor exhaust gas purifying equipment can be used for preferable separating and collecting of dust in exhaust gas, is capable of recycling water, saving water source, purifying exhaust gas, and realizing effective separation of harmful substances from exhaust gas.

Description

technical field [0001] The invention relates to the technical field of waste gas purification equipment, in particular to semiconductor waste gas purification equipment. Background technique [0002] Semiconductor waste gas purification equipment is a kind of semiconductor waste gas purification equipment that purifies the waste gas generated during the production of semiconductors. It uses different technologies to recycle or remove harmful components in the waste gas to achieve the purpose of purifying the air and protecting the environment, so that our environment is free from Pollution has played a very important role in the rapid development of modern industrial production. [0003] However, the traditional semiconductor exhaust gas purification equipment cannot effectively collect and separate the dust contained in the exhaust gas, causing the dust to pollute the interior of the equipment, and it will also float out of the equipment to pollute the surrounding environme...

Claims

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Application Information

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IPC IPC(8): B01D50/00B01D53/78B01D53/75B01D53/04
CPCB01D50/00B01D53/04B01D53/75B01D53/78
Inventor 司马超陈彦岗张坤杨春水赵力行邹昭平蒋俊海于浩
Owner 安徽京仪自动化装备技术有限公司
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