Particulate matter detection device and particulate matter detection method
A particle detection and particle technology, which is applied in the direction of measuring devices, particle suspension analysis, particle and sedimentation analysis, etc., can solve the problems of real-time detection of semiconductor production equipment and achieve the effect of realizing detection, improving efficiency and accuracy
Inactive Publication Date: 2018-10-16
YANGTZE MEMORY TECH CO LTD
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Problems solved by technology
[0006] The invention provides a particle detection device and a particle detection method, which are used to solve the problem in the prior art that the real-time detection of the particles inside the semiconductor production equipment cannot be performed efficiently and accurately, so as to ensure the continuous and stable progress of the semiconductor manufacturing process.
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[0042] The specific implementations of the particle detection device and the particle detection method provided by the present invention will be described in detail below with reference to the accompanying drawings.
[0043] In the semiconductor manufacturing process, the particulate matter inside the semiconductor equipment is an important condition to ensure the normal progress of the semiconductor process. Therefore, it is necessary to detect the particle information inside the semiconductor equipment. Since most semiconductor equipment needs to be in a closed vacuum or low pressure state when performing semiconductor processing procedures, at this time, the chamber door of the semiconductor processing chamber cannot be opened to monitor the particle situation. At present, the method for detecting the particle information inside the semiconductor equipment needs to be carried out when the semiconductor equipment is shut down. Therefore, it is impossible to monitor the parti...
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Abstract
The invention relates to the technical field of manufacturing of a semiconductor, in particular to a particulate matter detection device and a particulate matter detection method. The particulate matter detection device comprises a particulate matter analysis instrument and a sampling pipeline, wherein the particulate matter analysis instrument is used for analyzing particulate matter informationin gas; the sampling pipeline comprises a first end and a second end which are arranged oppositely; the first end is used for being communicated with an exhaust port of a semiconductor treatment chamber; the second end is used for being communicated with the particulate matter analysis instrument; and the sampling pipeline is used for transmitting gas in the semiconductor treatment chamber to theparticulate matter analysis instrument. Real-time detection of the condition of the particulate matters in the semiconductor treatment chamber is realized, the detection efficiency and the accuracy degree of the particulate matters are improved, and continuous and stable semiconductor manufacturing process is guaranteed.
Description
technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a particle detection device and a particle detection method. Background technique [0002] With the development of planar flash memory, the production process of semiconductors has made great progress. However, in recent years, the development of planar flash memory has encountered various challenges: physical limits, existing development technology limits, and storage electron density limits. In this context, in order to solve the difficulties encountered in planar flash memory and pursue lower production costs per unit storage unit, various three-dimensional (3D) flash memory structures have emerged, such as 3D NOR (3D or not) flash memory and 3D NAND (3D NAND) flash memory. [0003] Among them, 3D NAND memory takes its small size and large capacity as the starting point, and the design concept of highly integrated storage units stacked in three-dimensiona...
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IPC IPC(8): G01N15/02G01N15/06
CPCG01N15/02G01N15/06
Inventor 董凯颜元李冠男王孝进
Owner YANGTZE MEMORY TECH CO LTD