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Thin film transistor (TFT), sensor, and biologic detection device and method

A technology of thin film transistors and sensors, applied in the field of sensors, can solve the problems such as the lack of mass production and application of solid-state electrolyte sensors

Active Publication Date: 2018-11-20
BOE TECH GRP CO LTD
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  • Abstract
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  • Claims
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Problems solved by technology

However, device structures based on solid-state electrolyte sensors have not yet been mass-produced and applied.

Method used

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  • Thin film transistor (TFT), sensor, and biologic detection device and method
  • Thin film transistor (TFT), sensor, and biologic detection device and method
  • Thin film transistor (TFT), sensor, and biologic detection device and method

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Embodiment Construction

[0037] Various exemplary embodiments of the present disclosure will now be described in detail with reference to the accompanying drawings. The description of the exemplary embodiments is merely illustrative and in no way limits the disclosure, its application or uses in any way. The present disclosure may be implemented in many different forms and is not limited to the embodiments described herein. These embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art. It should be noted that relative arrangements of parts and steps, compositions of materials, numerical expressions and numerical values ​​set forth in these embodiments should be interpreted as illustrative only and not as limiting, unless specifically stated otherwise.

[0038] As used in this disclosure, "first," "second," and similar words do not denote any order, quantity, or importance, but are merely used to dist...

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Abstract

The invention provides a TFT, a sensor and a biologic detection device and method, and relates to the technical field of sensors. The TFT comprises a substrate, a first grid on the substrate, a firstdielectric layer covering the first grid on the substrate, a source electrode, a drain electrode, a semiconductor layer, a second dielectric layer covering the semiconductor layer and made of a solidelectrolyte material and a second grid; and the source electrode, the drain electrode and the semiconductor layer are positioned in the side far from the first grid of the first dielectric layer, thesource and drain electrodes are connected with the semiconductor layer, and the second grid is in the side, far from the semiconductor layer of the second dielectric layer. The TFT is high in detection sensitivity.

Description

technical field [0001] The present disclosure relates to the technical field of sensors, in particular to a thin film transistor, a sensor, a biological detection device and a method. Background technique [0002] In the related art, the electrolyte gate dielectric has gradually attracted extensive attention. The mobile ions inside the electrolyte gate dielectric can form an electric double layer at the interface of the electrolyte and the active layer at a small gate voltage, resulting in a huge capacitance. Therefore, compared with the traditional TFT, the TFT (Thin Film Transistor, Thin Film Transistor) with electrolyte as the gate dielectric is more sensitive to gate pressure. However, because the electrolyte is mostly liquid, it is difficult to match with solid-state devices and has poor stability, and the preparation process cannot match the mass production technology, so electrolyte devices have not been widely used and mass-produced. With the development of technol...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L29/786H01L21/336G01N27/414
CPCH01L29/66742H01L29/78648G01N27/4145G01N27/4146
Inventor 马啸尘
Owner BOE TECH GRP CO LTD
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