Nozzle cleaning device, coating device, and nozzle cleaning method
A technology of cleaning device and nozzle, applied in the direction of spraying device, spraying device, etc., can solve the problems of reduced cleaning performance and reduced coating quality, etc.
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[0038] figure 1 It is a figure which schematically shows the whole structure of the coating apparatus equipped with one embodiment of the nozzle cleaning apparatus of this invention. The coating device 1 is directed from figure 1 A slit coater for coating the upper surface Wf of the substrate W conveyed in a horizontal posture on the left-hand side of the right-hand side with a coating liquid. In addition, in order to clarify the arrangement relationship of each part of the device, in each of the following figures, the conveyance direction of the substrate W is referred to as the "X direction", and the figure 1 The horizontal direction from the left-hand side to the right-hand side is called "+X direction", and the opposite direction is called "-X direction". In addition, in the horizontal direction Y perpendicular to the X direction, the front side of the device is referred to as "-Y direction", and the rear side of the device is referred to as "+Y direction". Moreover,...
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