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Coating equipment and film coating abnormality detecting method

A kind of coating equipment and coating technology, which is applied to the device and coating of the surface coating liquid, which can solve the problems of inability to achieve the improvement effect, sprinkler streaks, time-consuming and labor-intensive problems, etc.

Active Publication Date: 2018-12-07
HKC CORP LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This operation is time-consuming and laborious, and may not achieve the improvement effect, and even lead to more nozzle streaks

Method used

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  • Coating equipment and film coating abnormality detecting method
  • Coating equipment and film coating abnormality detecting method
  • Coating equipment and film coating abnormality detecting method

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Embodiment Construction

[0049] In order to make the purpose, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described through implementation with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are the embodiment of the present invention. Some, but not all, embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0050] figure 1 It is a schematic structural diagram of a coating equipment provided by an embodiment of the present invention. refer to figure 1 , the coating equipment includes: a substrate to be coated 10 and a plurality of liquid outlet units 20; the substrate to be coated 10 includes a coating area 101, and the coating area 101 includes a pluralit...

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Abstract

The invention discloses coating equipment and a film coating abnormality detecting method. The coating equipment comprises a substrate to be coated and multiple liquid outlet units; the substrate to be coated comprises a coating area; the coating area comprises multiple coating subareas; all the coating subareas are arranged in a first direction in sequence; each coating subarea corresponds to a first identifying code; the first identifying codes respectively correspond to the coating subareas; each first identifying code corresponds to one liquid outlet unit; and the liquid outlet units are used for coating preset solution in the corresponding coating subareas. In the coating equipment, as the first identifying codes respectively correspond to the coating subareas, and each first identifying code corresponds to one liquid outlet unit, each coating subarea can correspond to one unique liquid outlet unit. When the film coating is abnormal, the abnormal coating state of the specific liquid outlet unit can be quickly and accurately determined according to the correspondence between the coating subareas and the liquid outlet units.

Description

technical field [0001] Embodiments of the present invention relate to semiconductor manufacturing technology, and in particular, to a coating device and a coating film abnormality detection method. Background technique [0002] Polyimide (Polyimide, PI) film is one of the earliest products of polyimide, because polyimide has excellent thermal stability, chemical corrosion resistance and mechanical properties; and chemical properties are stable, no need to add flame retardant agent can be flame retardant. Therefore, polyimide films are widely used in the semiconductor field. For example, polyimide films can be used as photoresists, dielectric layers, buffer layers, protective layers, or flexible substrates. Usually, the polyimide film is formed by spraying the polyimide pre-prepared solution on the substrate through a polyimide spraying machine (or called PI film coating equipment), and heating and curing. The PI film coating equipment will occasionally have abnormal spray...

Claims

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Application Information

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IPC IPC(8): B05C5/02B05C11/10
CPCB05C5/027B05C11/1015
Inventor 郭晓斌
Owner HKC CORP LTD
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