High-performance microfocus X-ray thickness gauge
A micro-focus and X-ray technology, which is applied in the field of high-performance micro-focus X-ray thickness gauges, can solve problems such as high brightness, unsatisfactory effects, and small light spots, and achieve the effects of ensuring analysis accuracy, simple structure, and increased luminous flux gain
Active Publication Date: 2018-12-18
SHENZHEN SENSE INSTR CO LTD
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Problems solved by technology
[0003] When an X-ray thickness gauge analyzes tiny sample points, it needs to focus the X-rays emitted by the X-ray tube to obtain a smaller spot and higher brightness. At present, the conventional optical focusing lens is used in this case. not ideal
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[0027] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, a clear and complete description will be made below in conjunction with the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, and Not all examples. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0028] The high-performance micro-focus X-ray thickness gauge of the preferred embodiment of the present invention is as figure 1 shown, see also Figure 2-9 , including an X-ray tube 1 emitting X-rays, a capillary assembly 2 focusing the X-ray tube 1, and a mounting bracket 3 for assembling the capillary assembly 2 with the X-ray outlet 10 of the X-ray tube 1; the capillary assembly 2 includes ...
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The invention relates to a high-performance microfocus X-ray thickness gauge. The X-ray thickness gauge comprises an X-ray tube for emitting X rays, a capillary assembly for focusing of the X-ray tube, and a mounting bracket for assembly of the capillary assembly and a X-ray outlet of the X-ray tube, wherein the capillary assembly comprises an optical fiber tube, and a vertical main light guide hole and a plurality of capillary light guide holes surrounding the main light guide hole are formed in the optical fiber tube; and each capillary light guide hole comprises a parallel section parallelto the main light guide hole, and a bent section communicated with the parallel section and bent towards the main light guide hole. The high-performance microfocus X-ray thickness gauge has the advantages that the capillary assembly and the X-ray outlet of the X-ray tube are assembled through the mounting bracket, so that the disordered X rays that are emitted from the X-ray tube enter the main light guide hole and the capillary light guide holes, and the X rays entering the capillary light guide holes firstly pass through the parallel sections and are then converged towards the main light guide hole under the guiding of the bent sections to achieve focusing, which greatly increases the light flux gains, and ensures high analysis precision and greatly reduces the analysis time during analysis of microscopic sample points; and the structure is very simple, the assembly is convenient, and the size is small.
Description
technical field [0001] The invention relates to the technical field of electron microscopes for X-ray thickness gauges, and more specifically relates to a high-performance micro-focus X-ray thickness gauge. Background technique [0002] The X-ray thickness gauge is a non-contact measuring instrument that detects the thickness of the material by using the characteristic that the intensity change of the X-ray is related to the thickness of the material when the X-ray penetrates the measured material; [0003] When an X-ray thickness gauge analyzes a tiny sample point, it needs to focus the X-rays emitted by the X-ray tube to obtain a smaller spot and higher brightness. At present, the conventional optical focusing lens is used in this case. not ideal. Contents of the invention [0004] The technical problem to be solved by the present invention is to provide a high-performance micro-focus X-ray thickness gauge for the above-mentioned defects of the prior art. [0005] The ...
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Login to View More IPC IPC(8): G01B15/02
CPCG01B15/02
Inventor 马银平沈非
Owner SHENZHEN SENSE INSTR CO LTD