A high-performance micro-focus x-ray thickness gauge
A micro-focus and X-ray technology, which is applied in the field of high-performance micro-focus X-ray thickness gauges, can solve problems such as unsatisfactory effects, high brightness, and small light spots, and achieve the effects of simple structure, guaranteed analysis accuracy, and increased luminous flux gain
Active Publication Date: 2021-07-30
SHENZHEN SENSE INSTR CO LTD
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Problems solved by technology
[0003] When an X-ray thickness gauge analyzes tiny sample points, it needs to focus the X-rays emitted by the X-ray tube to obtain a smaller spot and higher brightness. At present, the conventional optical focusing lens is used in this case. not ideal
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[0027] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, a clear and complete description will be made below in conjunction with the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, and Not all examples. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0028] The high-performance micro-focus X-ray thickness gauge of the preferred embodiment of the present invention is as figure 1 shown, see also Figure 2-9 , including an X-ray tube 1 emitting X-rays, a capillary assembly 2 focusing the X-ray tube 1, and a mounting bracket 3 for assembling the capillary assembly 2 with the X-ray outlet 10 of the X-ray tube 1; the capillary assembly 2 includes ...
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The invention relates to a high-performance micro-focus X-ray thickness gauge, comprising an X-ray tube emitting X-rays, a capillary assembly focusing the X-ray tube, and a mounting bracket for assembling the capillary assembly and the X-ray outlet of the X-ray tube; The capillary assembly includes an optical fiber tube, which is provided with a vertical main light hole and a plurality of capillary light guide holes arranged around it; the capillary light guide hole includes a parallel section parallel to the main light hole, and a guide main hole connected to the parallel section. The bending section of the light hole bending; the capillary assembly is assembled with the X-ray outlet of the X-ray tube through the mounting bracket, and the messy X-rays emitted by the X-ray tube enter the main light hole and multiple capillary light guide holes, and enter the capillary The X-rays of the light guide hole are converged toward the direction of the main light hole under the guidance of the bending section after passing through the parallel section to achieve focusing, which greatly increases the luminous flux gain. When analyzing tiny sample points, it greatly reduces the analysis accuracy while ensuring the analysis accuracy Analysis time, and the structure is very simple, easy to assemble, small size.
Description
technical field [0001] The invention relates to the technical field of electron microscopes for X-ray thickness gauges, and more specifically relates to a high-performance micro-focus X-ray thickness gauge. Background technique [0002] The X-ray thickness gauge is a non-contact measuring instrument that detects the thickness of the material by using the characteristic that the intensity change of the X-ray is related to the thickness of the material when the X-ray penetrates the measured material; [0003] When an X-ray thickness gauge analyzes a tiny sample point, it needs to focus the X-rays emitted by the X-ray tube to obtain a smaller spot and higher brightness. At present, the conventional optical focusing lens is used in this case. not ideal. Contents of the invention [0004] The technical problem to be solved by the present invention is to provide a high-performance micro-focus X-ray thickness gauge for the above-mentioned defects of the prior art. [0005] The ...
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IPC IPC(8): G01B15/02
CPCG01B15/02
Inventor 马银平沈非
Owner SHENZHEN SENSE INSTR CO LTD