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An LED condensing light source and an exposure light source system using the LED condensing light source

A light source system and LED lamp bead technology, which is applied in microlithography exposure equipment, photolithography exposure devices, optics, etc., can solve the problems of inconsistent parallel half angles, poor product quality consistency, low production efficiency, etc., and achieve parallel half angle consistency , Improve exposure efficiency, good uniformity effect

Pending Publication Date: 2018-12-21
东莞市友辉光电科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the LED exposure light source is arranged in a dot matrix of LED lights. When the exposure operation is carried out by scanning, since the irradiation angle of each LED light is affected by the butterfly mirror at the front of the light, when the attenuation of the lamp beads in the LED dot matrix is ​​inconsistent or a certain LED light fails, it will cause problems. There are defects such as poor uniformity of exposure light sources between dot matrixes and inconsistencies in parallel half-angles, making it impossible to produce fine electronic circuits, resulting in poor product quality consistency and low production efficiency

Method used

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  • An LED condensing light source and an exposure light source system using the LED condensing light source
  • An LED condensing light source and an exposure light source system using the LED condensing light source

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Embodiment Construction

[0020] The idea, specific structure and technical effects of the present invention will be further described below in conjunction with the accompanying drawings, so as to fully understand the purpose, features and effects of the present invention.

[0021] refer to figure 1 As shown, the present invention relates to an LED concentrating light source, including an LED concentrating light source device main body 1, the LED concentrating light source device main body 1 has a front mounting plate 11, a driving board 13 and a housing 14, and the housing 14 provides the front mounting plate 11 and the installation position of the driving board 13, and a plurality of LED lamp beads 12 are installed on the front mounting board 11, and the LED lamp beads 12 are electrically connected to the driving board 13; of light spots. The light spot reaches the light intensity required for exposure, which solves the problem of exposure operation caused by inconsistent attenuation of lamp beads o...

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Abstract

A LED condense light source includes a front mount plate, a driving plate and a housing, a plurality of LED lamp beads are mounted on the front mounting plate, the LED lamp bead are electrically connected with the driving plate, and the plurality of LED lamp beads are illuminated and superimposed to form a light spot of the condensing light source at a design focus. In an exposure light source system using an LED condensing light source, a light spot is integrated and distributed through a fly-eye lens group to form a uniform multi-point light source; a cold mirror absorbs the multi-point light source transmitted by the fly-eye lens group and reflects the multi-point light source onto a spherical mirror; and the spherical mirror absorbs the reflection integration of the multi-point light source to form a surface light source, and projects the surface light source onto a worktable for exposure operation. The invention utilizes the light emitting points of a plurality of LEDs to superimpose and assemble into the light spot of a condensing light source, achieves the light intensity required for exposure, solves the exposure operation problem caused by the inconsistent attenuation of lamp beads or the failure of an LED lamp, obtains a uniform exposure light source, improves the exposure efficiency, and is suitable for the manufacture of a flexible fine circuit.

Description

technical field [0001] The invention relates to the technical field of exposure equipment, in particular to the light source structure of the exposure equipment for flexible substrates. Background technique [0002] At present, LED lamps are small in size and light in weight, encapsulated in epoxy resin, can withstand high-intensity mechanical shock and vibration, and are not easy to break. The average lifespan is 100,000 hours. The service life of LED lamps can reach 5-10 years; at the same time, LED lamps respond quickly and can be operated at high frequencies. Under the same lighting effect, the power consumption is one ten thousandth of incandescent bulbs and one half of fluorescent tubes. , because the LED light source is environmentally friendly and energy-saving, there are many LED light sources on the market instead of high-energy mercury lamps as exposure light sources. At present, the LED exposure light source is arranged in a dot matrix of LED lights. When the e...

Claims

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Application Information

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IPC IPC(8): G03F7/20
CPCG03F7/70008G03F7/70075G03F7/7015G03F7/70358
Inventor 余燕青
Owner 东莞市友辉光电科技有限公司
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