Differential displacement sensor with refractor and measuring method thereof

A technology of displacement sensor and refracting mirror, which is applied in the field of measurement, can solve the problems of sensor magnification influence, PSD measurement accuracy decrease, etc., and achieve effective measurement, continuous displacement measurement, and displacement measurement effect

Pending Publication Date: 2018-12-25
BEIFANG UNIV OF NATITIES
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the measurement magnification of the displacement sensor is related to the incident angle of the PSD, and the magnification of the sensor is eas

Method used

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  • Differential displacement sensor with refractor and measuring method thereof
  • Differential displacement sensor with refractor and measuring method thereof
  • Differential displacement sensor with refractor and measuring method thereof

Examples

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Embodiment 1

[0040] see figure 2 In this embodiment, a differential displacement sensor with a refractor is provided, including a laser source 1, a triangular wave reflector 3, a beam splitter group 4, a refractor one 5, a refractor two 6, a photodetector one 7, Photodetector II 8.

[0041] Wherein, the laser source 1 is used to emit the laser beam 2, and shoots to a reflective surface 31 of the triangular wave reflector 3; the beam splitter group 4 includes a beam splitter 41 and a mirror 42, and the beam splitter 41 and the mirror 42 are vertically arranged , the laser beam 2 reflected by the reflective surface of the triangular wave reflector 3 is incident on the beam splitter 41, a part of the laser beam 2 is incident on the refractor 1 after being reflected by the beam splitter and the mirror, and the other part of the laser beam 2 is incident after being transmitted by the beam splitter To the refractor two 6; photodetector one 7 and photodetector two 8 are arranged in parallel, an...

Embodiment 2

[0064] can refer to Figure 5 , the difference between the differential displacement sensor with refracting mirror in this embodiment and the differential displacement sensor with refracting mirror described in Embodiment 2 is that the differential displacement sensor with refracting mirror provided in this embodiment In the type displacement sensor, it includes two reading heads, and the two reading heads have the same structure and are placed symmetrically.

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Abstract

The invention provides a differential displacement sensor with a refractor and a measuring method thereof. The displacement sensor comprises a laser beam, a beam splitter group, and a processing system, wherein the laser beam is incident on a reflecting surface of a triangular wave reflector; the beam splitter group comprises a beam splitter and a reflector which are arranged at an angle, the laser beam reflected by the reflecting surface of the triangular wave reflector is incident on the beam splitter, wherein a part of the laser beam is reflected by the beam splitter and the reflector and then incident on the refractor 1, and the other part of the laser beam is transmitted through the beam splitter and then incident on the refractor 2; the processing system is configured to calculate adisplacement change value of the measured object according to a change amount of the incident position of the laser beam received by a photodetector 1 and a photodetector 2. The differential displacement sensor with a refractor reduces the angle at which the laser is incident on the photodetector by providing the refractor 1 and the refractor 2, thereby improving the measurement accuracy of the displacement sensor.

Description

technical field [0001] The invention relates to the field of measurement technology, in particular to a differential displacement sensor with a refracting mirror and a measurement method thereof. Background technique [0002] The new principle of displacement measurement based on the optical triangular amplification method is realized on the basis of the optical triangular amplification method, combined with triangular wave optical devices and high-precision PSD (Position Seitive Device, position sensitive (sensitive) detector). The triangular wave optical device subdivides the linear displacement into equal intervals, reduces the processing accuracy and size requirements of optical devices, and at the same time reduces the size requirements of high-precision PSD, and realizes high-precision displacement measurement in a small range. However, the displacement sensor in the prior art, for example, the application number is 201810481648.3, and the name is the displacement sens...

Claims

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Application Information

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IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 张白康学亮
Owner BEIFANG UNIV OF NATITIES
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