Differential displacement sensor with refractor and measuring method thereof

Abstract

The invention provides a differential displacement sensor with a refractor and a measuring method thereof. The displacement sensor comprises a laser beam, a beam splitter group, and a processing system, wherein the laser beam is incident on a reflecting surface of a triangular wave reflector; the beam splitter group comprises a beam splitter and a reflector which are arranged at an angle, the laser beam reflected by the reflecting surface of the triangular wave reflector is incident on the beam splitter, wherein a part of the laser beam is reflected by the beam splitter and the reflector and then incident on the refractor 1, and the other part of the laser beam is transmitted through the beam splitter and then incident on the refractor 2; the processing system is configured to calculate adisplacement change value of the measured object according to a change amount of the incident position of the laser beam received by a photodetector 1 and a photodetector 2. The differential displacement sensor with a refractor reduces the angle at which the laser is incident on the photodetector by providing the refractor 1 and the refractor 2, thereby improving the measurement accuracy of the displacement sensor.

Description

technical field [0001] The invention relates to the field of measurement technology, in particular to a differential displacement sensor with a refracting mirror and a measurement method thereof. Background technique [0002] The new principle of displacement measurement based on the optical triangular amplification method is realized on the basis of the optical triangular amplification method, combined with triangular wave optical devices and high-precision PSD (Position Seitive Device, position sensitive (sensitive) detector). The triangular wave optical device subdivides the linear displacement into equal intervals, reduces the processing accuracy and size requirements of optical devices, and at the same time reduces the size requirements of high-precision PSD, and realizes high-precision displacement measurement in a small range. However, the displacement sensor in the prior art, for example, the application number is 201810481648.3, and the name is the displacement sens...

AI Technical Summary

Problems solved by technology

However, the measurement magnification of the displacement sensor is related to the incident angle of the PSD, and the magnification of the sensor is easily affected, that is, when the incident angle of the laser beam incident on the PSD increases, the measurement accuracy of the PSD itself will decrease.

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