A detection device and detection method for laminated substrates
A detection device and substrate technology, applied in the detection field, can solve the problems of inability to detect the cutting quality, the inability to detect the distance from the cutting line to the edge of the substrate, etc., and achieve the effect of improving the detection effect
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[0028] The following will clearly and completely describe the technical solutions of each exemplary embodiment provided by the present invention with reference to the accompanying drawings in the embodiments of the present invention. In the case of no conflict, the following embodiments and features in the embodiments can be combined with each other.
[0029] In one embodiment, the inspection device for laminated substrates includes: light source equipment, lighting equipment, and processing equipment, which are coupled and connected to the lighting equipment. The angle between the incident light emitted by the light source equipment and the plane where the laminated substrate to be inspected is θ1, 0<θ1<180°, the lighting equipment collects the reflected light of the laminated substrate to be inspected to the incident light to form a detection image, and the processing equipment processes Detect the image and analyze whether the parameters of the detected image match the pres...
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