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Evaporation device and preparation method of protection layer of device

A protective layer and evaporation technology, applied in vacuum evaporation plating, coating, sputtering plating, etc., can solve problems such as corrosion damage

Pending Publication Date: 2019-01-08
上海祖强能源有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Based on this, it is necessary to provide an evaporation device and a method for preparing a protective layer of the device in view of the problem that the existing crucible is easily damaged by corrosion

Method used

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  • Evaporation device and preparation method of protection layer of device
  • Evaporation device and preparation method of protection layer of device
  • Evaporation device and preparation method of protection layer of device

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Embodiment Construction

[0046] In order to make the purpose, technical solution and advantages of the present application clearer, an evaporation device and an oxide layer preparation method of the evaporation device of the present application will be further described in detail through the following examples and in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to explain the present application, not to limit the present application.

[0047] See figure 1 In one embodiment of the present application, a method for preparing an oxide layer of an evaporation device is provided. Described preparation method comprises:

[0048] S100, providing a preset proportion of the first alkaline electrolyte and immersing the device in the first alkaline electrolyte, passing a current with a preset current density value through the first alkaline electrolyte, passing through the first alkaline electrolyte Primary micro-arc oxidation fo...

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Abstract

The application provides an evaporation device and a preparation method of a protection layer of the device. The evaporation device comprises a crucible and the protection layer covered on the crucible, wherein the crucible comprises an inner side surface, an outer side surface and a wall surface located at a junction position of the inner side surface and the outer side surface in the thickness direction of the crucible; the protection layer comprises a first protection layer, a second protection layer and a third protection layer; the first protection layer covers the inner side surface, thethickness of the first protection layer is 1mu m-150mu m, and the first protection layer is used for preventing evaporant from corroding the inner side surface; the second protection layer covers theouter side surface and is used for preventing the evaporant from overflowing to corrode the outer side surface; and the third protection layer covers the wall surface and is used for preventing the evaporant from overflowing to corrode the wall surface. The crucible is wholly covered with the protection layer, so that the crucible can be well protected by the protection layer, and the crucible isprevented from being corroded and damaged by a corrosive material.

Description

technical field [0001] The present application relates to the technical field of evaporation devices, in particular to an evaporation device and a method for preparing a protective layer of the device. Background technique [0002] In the field of photovoltaics, it is often necessary to use evaporation devices to evaporate thin films on solar substrates, and most evaporation devices are crucibles. However, most of the evaporated materials are corrosive. When the evaporated materials are heated at high temperature in the crucible, the evaporated materials may react with the crucible itself. Over time, corrosion damage to the crucible surface can result. [0003] In the existing crucible, the crucible is placed in an oxygen-rich environment to oxidize the crucible to form a thin film. However, the thickness of this oxide layer is extremely small, and it is easy to fall off, so it is difficult to play a protective role. Contents of the invention [0004] Based on this, it ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C25D11/02C25D11/26
CPCC23C14/243C25D11/026C25D11/26
Inventor 鲁玉泉
Owner 上海祖强能源有限公司
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