Dust removal device for micro-electronic component

Abstract

The invention discloses a dust removal device for a micro-electronic component. The dust removal device for the micro-electronic component comprises a rectangular box, wherein a same cone box is welded to the top of the inner walls of the two sides of the rectangular box, and a hollow cylinder is welded to the inner wall of the cone box; an ion generator and a dust collector are correspondingly fixedly installed on the two sides of the hollow cylinder, and a circular plate is welded to the inner wall of the cone box; and a same transverse plate is welded to the inner wall of the two sides of the rectangular box. The dust removal device for the micro-electronic component has simple structure, the ion generator can generate ionic wind, and the ionic wind is blown to the surface of the micro-electronic component through a ionic wind gun, a fur brush can brush away dust which cannot be blown off by the ionic wind, meanwhile, the dust collector can suck away the dust through a dust collection head and a dust collection box, so that the ionic wind gun can focus on and blow the ionic wind to the surface of the micro-electronics component at a close range, the effect of electrostatic eliminating is good, and the dust collection head can suck away the dust which is removed from the micro-electronics component by the fur brush and the ionic wind gun at a close range, the dust can be sucked away in time, secondary pollution is avoided, and the use is convenient.

Description

technical field [0001] The invention relates to the technical field of microelectronic dust removal, in particular to a dust removal device for microelectronic devices. Background technique [0002] The invention with the notification number CN206443651U discloses a dust removal device for microelectronic devices, including a support circular plate, an annular sleeve is arranged on the outer periphery of the support circular plate, the sleeve body of the annular sleeve is a hollow structure, and several through holes are opened inside the sleeve body of the annular sleeve. The air hole is connected to one end of the conduit by the annular sleeve, and the other end of the conduit is connected to the vacuum cleaner; an ion air gun is installed in the middle of the supporting circular plate, and the ion air gun is connected to the ion generator. In the present invention, the annular sleeve is fastened on the chip to form a relatively closed space, and the dust is sucked away by...

AI Technical Summary

Problems solved by technology

[0003] But the ion wind of this microelectronic device dedusting device is blown to the microelectronic device from the top by the fan, and the distance is relatively long, which will cause the ion wind blown to the surface of the microelectronic device to be scattered, resulting in a bad effect of removing static electricity, and absorbing The dust outlet is far away from the middle area of ​​the microelectronic device, and the dust cannot be sucked away in time, which will cause secondary pollution. Therefore, we propose a microelectronic device dust removal device to solve the above-mentioned problems

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