Vacuum sealed valve leakage rate test system and method

Abstract

The invention provides a vacuum sealed valve leakage rate test system and method. The system consists of a first vacuum pump set and a second vacuum pump set, a leak detector, a vacuum chamber, a vacuum valve test cover, a pressure gauge, a standard leak hole, vacuum gauges, a gas source, and a first vacuum valve, a second vacuum valve, a third vacuum valve, a fourth vacuum valve, a fifth vacuum valve, a sixth vacuum valve, and a seventh vacuum valve, wherein the first vacuum pump set is connected to the vacuum chamber through the first vacuum valve, and the leak detector is connected to the vacuum chamber through the second vacuum valve. The vacuum chamber is connected to one ends of the vacuum gauges, the third vacuum valve and the fifth vacuum valve respectively. The other end of the fifth vacuum valve is connected to the standard leak hole. A tested vacuum valve is installed in the vacuum valve test cover, one end of the tested vacuum valve is connected to the other end of the third vacuum valve, and the other end is respectively connected to the fourth vacuum valve and the pressure gauge. The gas source is in connection with the vacuum valve test cover through the sixth vacuumvalve, and the second vacuum pump set is in connection with the vacuum valve test cover through the seventh vacuum valve respectively. The system and method provided by the invention realize quantitative test of the vacuum valve local leakage rate and total leakage rate, and greatly improves the measurement uncertainty of vacuum sealed valve leakage rate.

Description

technical field [0001] The invention belongs to the technical field of vacuum testing, and relates to a vacuum sealing valve leakage rate testing system and method. Background technique [0002] Vacuum valves are vacuum components used to isolate (cut off) airflow, adjust airflow flow, and distribute airflow in vacuum systems. They play an important role in simple or complex vacuum systems, and their leak rate often becomes a vacuum system. A short board that reaches a certain degree of vacuum. [0003] However, for the current test of the vacuum valve leakage rate, although the China Development and Reform Commission has issued the China Machinery Industry Vacuum Valve Standard JB / T6446-2004, it only gives the injection method and the helium hood method, and does not make a specific test system. Therefore, each manufacturer has its own factory inspection system, and each provincial and municipal quality supervision center also has its own evaluation system and method, and ...

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Problems solved by technology

[0004] The problem to be solved by the invention is to solve the problem that the leak rate test structure of the current vacuum-sealed valve is complicated, and the measurement uncertainty of the leak rate of the vacuum-sealed valve is large, which leads to inaccurate test results

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