Method for manufacturing multiple laser diodes and laser diodes

Abstract

A method for producing a plurality of laser diodes (1) is proposed, with the following method steps: providing a plurality of laser bars (2) in a composite (20), wherein the laser bars (2) each comprise a plurality of The laser diode element (3), and the laser diode element (3) has a common substrate (4) and each semiconductor layer sequence (5) arranged on the substrate (4), and respectively in two adjacent Longitudinal separation lines (y-y') that extend between the laser bars divide the composite (20) so that the laser facets (1C) that constitute the laser diode (1) to be manufactured are split; at least one longitudinal separation line (y-y') a structured composite (20) at y'), wherein a strained compensation layer (8) is applied to the semiconductor layer sequence (5) at the longitudinal separation line (y-y') and / or is at least partially removed Sequence of semiconductor layers. Furthermore, a laser diode (1) is proposed which can be produced by means of this method.

Description

technical field [0001] A method for manufacturing a plurality of laser diodes is presented. In particular, the laser diode is split from the plurality of laser bars present in the composite. Furthermore, a laser diode is proposed which can be produced by means of this method. Background technique [0002] A possible method for dividing the laser rod arranged in the composite part is to break the laser rod. In this case, the composite part is preferably fractured in a targeted manner at the crystallographic planes of the material used for the laser rod in order thereby to form the laser facets of the laser diode to be produced. Ideally, the fracture surface is atomically smooth so as to have small roughness and sufficient optical reflectivity for laser operation. [0003] However, the formation of the laser facets is a technical challenge, since different factors, such as the type of fracture process, the initiation of fracture at the introduced notches, and the global and...

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Problems solved by technology

[0003] However, the formation of the laser facets is a technical challenge, since different factors, such as the type of fracture process, the initiation of fracture at the introduced notches, and the global and local stress relationships of the laser rod assembly affect the laser facets. surface quality

For example, in the case of an unfavorable stress relationship, crystal damage can form on the laser facets, which on the one hand impairs the reflectivity and leads to a lower light yield, and on the other hand is a quality risk, because all Damage to the crystal described above can lead to spontaneous failure

However, changes in the basic structure of the laser rod assembly cannot be carried out easily, since they can damage the fracture on the one hand and the function of the finished laser diode on the other hand.

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