Method for detecting integrity of substrate pattern array

A technology of integrity detection and patterning, which is applied in semiconductor/solid-state device testing/measurement, electrical components, circuits, etc., can solve the problems of high equipment cost, labor cost, long detection time, etc., and achieve the goal of reducing input cost and improving efficiency. Effect

Active Publication Date: 2019-02-22
WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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Problems solved by technology

[0003] The invention provides a method for detecting the integrity of a substrate pattern array to solve the problems in the prior art, such as high equipment cost and labor cost and long detection time, when using an automatic optical detection machine for detection

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  • Method for detecting integrity of substrate pattern array
  • Method for detecting integrity of substrate pattern array
  • Method for detecting integrity of substrate pattern array

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Embodiment Construction

[0024] The following description of the embodiments refers to the accompanying drawings to illustrate specific embodiments in which the invention may be practiced. The directional terms mentioned in the present invention, such as "up", "down", "front", "back", "left", "right", "top", "bottom", etc., are only for reference to the attached drawings. direction. Therefore, the directional terms used are used to illustrate and understand the present invention, but not to limit the present invention.

[0025] The invention discloses a method for detecting the integrity of a substrate pattern array, which is used for detecting the organic light emitting diode (OLED) pixel definition layer (PDL) and the gap control layer (PS) of the panel array backplane.

[0026] Such as figure 1 As shown, the pattern array in the pixel definition layer (PDL) includes three periodic patterns of red pixel definition pattern 100, blue pixel definition pattern 101, and green pixel definition pattern 1...

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Abstract

The present invention discloses a method for detecting the integrity of a substrate pattern array, comprising the steps of a grayscale map acquisition step for acquiring a grayscale image of the substrate pattern array; a numerical processing step for performing sampling numerical processing on the grayscale image to obtain a grayscale value signal; a Fourier transform step for converting the grayscale value signal into the frequency-domain signal distribution; and a comparison analysis step for analyzing the frequency-domain signal distribution to obtain the integrity information of the substrate pattern array. The method can quickly and accurately detect the consistency and the integrity of the patterns in the substrate pattern array, discriminates the type of a defect, and provides a detection basis for the defect repair of a sample to be tested.

Description

technical field [0001] The invention relates to the fields of flexible display device detection and the like, in particular to a method for detecting the integrity of a substrate pattern array. Background technique [0002] In flexible display devices, especially active-matrix organic light-emitting diodes or active-matrix organic light-emitting diodes (AMOLED) display substrates, the tiny periodic patterns usually obtained by exposure and / or etching, their respective integrity The consistency of distribution and distribution is the premise to ensure the normal operation of each display pixel or each auxiliary display unit. The detection of these periodic patterns (such as dots, lines, matrixes of plane / stereo figures, etc.) is usually completed by an automatic optical inspection machine (Automatic Optical Inspection, AOI). The automatic optical inspection machine judges whether the current block (such as a pixel) has any graphic anomalies by comparing the consistency betwe...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/66
CPCH01L22/12H01L22/20
Inventor 刘哲
Owner WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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