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44results about How to "Detection stability" patented technology

Aircraft holder stability testing device and method based on digital camera

The invention discloses an aircraft holder stability testing device and an aircraft holder stability testing method based on a digital camera. A fixed bracket is arranged on the periphery of an aircraft, the top part of the aircraft is fixed to the lower end of a supporting rod through a universal joint and is positioned at the center of the fixed bracket, an oilcloth is horizontally arranged at the bottom surface of a frame of the fixed bracket, a logo image is arranged on the oilcloth, the digital camera is in rigid connection with a body of the aircraft, and the aircraft and the digital camera are connected with a PC upper computer on the ground through a picture data transmission system; and the digital camera is calibrated firstly, a relation between a pixel position of an image of the digital camera and a logo point position on the oilcloth is established, the fixed bracket and the oilcloth are kept in parallel to the ground horizontally in flight, exterior orientation parameters are obtained through processing picture data acquired in real time, and the stability result of an aircraft holder is obtained through variance calculation. The aircraft holder stability testing device adopts the scientific and effective aircraft holder stability testing method for detection stability of the aircraft holder, is simple and reasonable in structure, high in universality and convenient to disassemble, and can be suitable for various kinds of aircraft holders.
Owner:CHINA JILIANG UNIV

Flying dust monitoring system based on unmanned aerial vehicle

The invention provides a flying dust monitoring system based on an unmanned aerial vehicle. The flying dust monitoring system comprises an unmanned aerial vehicle system, a flying dust monitoring sensor system, a network transmission module and a cloud platform data processing system. According to the flying dust monitoring system, the flying dust data of a construction site field can be accurately collected in real time, the defects of manual fixed-point type flying dust monitoring at present are eliminated, and the problems of the real-time hysteresis, the space limitation, the low accuracyand the like of a traditional flying dust monitoring system are overcome.
Owner:CHINESE RES ACAD OF ENVIRONMENTAL SCI

Automobile frame aerodynamics test system and test method

The invention relates to an automobile frame aerodynamics test system and a test method. The automobile frame aerodynamics test system comprises a test base, a supporting device, a locking device anda fan, wherein a square groove is arranged on a middle portion of the test base; the outer end of the square groove of the test base is symmetrically provided with an arc groove; the front side wall of the square groove on the test base is provided with a controller; the square groove of the test base is internally provided with the supporting device; the top part of the supporting device is provided with the locking device; the fan is mounted at the right top part of the test base; and the supporting device comprises a rotating motor, a rotating supporting plate, a rotating sliding column, aguiding cylinder, a guiding mechanism, a supporting cylinder, a supporting connecting plate and a detecting mechanism. The problems that when the existing frame is subjected to aerodynamics test, different types of frames can not be locked, the frame placing position needs to be adjusted and put straight manually, multi-angle aerodynamics test on the frame can not be carried out, detection of theframe aerodynamics test is inaccurate and the like can be solved.
Owner:苏州郅荣软件有限公司

Impact type pulse triggering time synchronization device

The invention discloses an impact type pulse triggering time synchronization device. The impact type pulse triggering time synchronization device comprises a knocking mechanism, a pulse generation circuit, a pulse conditioning circuit and a pulse output interface circuit, which are connected in sequence, wherein the knocking mechanism comprises a telescopic knocking hammer; the telescopic knocking hammer is connected with a potentiometer through a metal contact; the potentiometer is connected with a normally closed switch of the pulse generation circuit; the normally closed switch is controlled to be turned on or turned off by applying a force to the telescopic knocking hammer; the pulse generation circuit is used for generating a pulse signal according to the turn-on or turn-off of the normally closed switch; the pulse conditioning circuit is used for conditioning the pulse signal into a specific wave signal according to electrical parameters of a trigger interface of a to-be-synchronized sensor and outputting the specific wave signal to the to-be-synchronized sensor through the pulse output interface circuit. The impact type pulse triggering time synchronization device is simple in structure, convenient to carry and use and high in generality, and can be used for time synchronization between motion perception sensors such as an inertial navigation system (INS) or an inertial measurement unit (IMU) and other types of sensors; the time synchronization accuracy can be guaranteed.
Owner:WUHAN UNIV

Visualized CYP2C19 genotyping detection kit

The invention relates to a CYP2C19 genotyping detection kit, which comprises 4 primers, 7 conventional probes, and 2 probes connected with nano gold particles. The primers are SEQ ID NO. 1 and SEQ ID NO. 2, SEQ ID NO. 3 and SEQ ID NO. 4; the conventional probes are SEQ ID NO.5 to SEQ ID NO. 11, or reverse complement sequences of SEQ ID NO. 5 to SEQ ID NO. 11; the base composition of the probes linked to the gold nanoparticle is as shown in SEQ ID NO. 12 to SEQ ID NO. 13, or reverse complement sequences of SEQ ID NO. 12 to SEQ ID NO. 13. The CYP2C19 genotyping detection kit can realize visualized, low-cost, and highly sensitive CYP2C19 genotyping assays.
Owner:广州市宝创生物技术有限公司

Phase error detection circuit and synchronization clock extraction circuit

In the phase error detection circuit of the synchronous clock extracting circuit for extracting the clock synchronized with the reproduced data, the cross reference value generating part (72) uses the rising phase error data (S3) calculated by the phase error calculating part (71) as rising The crossing reference value (S5) is input to the ascending crossing detection unit (70a), and the calculated descending phase error data (S4) is similarly output to the descending crossing detection unit (70b) as the descending crossing reference value (S6). The two intersection detection parts (70a, 70b) respectively calculate the difference between the regeneration data value of the sample point and the above-mentioned input cross reference value (cross deviation value) (S5, S6), when one of the two difference values ​​of the continuous sample points When one is negative and the other is positive, the rising and falling cross detection signals are output. Therefore, the capture band is expanded.
Owner:PANASONIC CORP

Server network card interaction test method and system, terminal and storage medium

The invention provides a server network card interaction test method and system, a terminal and a storage medium. The server network card interaction test method comprises the steps of setting a system pressurization script and simulating a system pressure environment by utilizing the system pressurization script; calling an flint instruction to refresh the test network card firmware and verifyinga refreshing result by utilizing an ethtool instruction; executing iperf pressurization through the test network card, so that the network utilization rate of the test network card is kept above a preset threshold value; and collecting bandwidth performance data abnormal information and a system error log, and if the bandwidth performance data abnormal information and the system error log are notcollected, judging that the test is passed. According to the invention, the stability of the network card in a complex environment can be effectively detected, and more stable and efficient service of the network card in actual application of a server is ensured.
Owner:INSPUR SUZHOU INTELLIGENT TECH CO LTD

Testing system and method for mixed-mode IC (integrated circuit)

The invention provides a testing system and a method for a mixed-mode IC (integrated circuit). The testing system comprises an analog-to-digital converter, a phase-locked loop, a timing pin, a first-in first-out buffer and an automatic testing device, wherein the analog-to-digital converter receives a testing signal and converts the testing signal into digital input data, the phase-locked loop receives a first external timing signal to generate an input timing signal, the timing pin is used for receiving a second external timing signal, the first-in first-out buffer is used for writing in the digital input data according to the input timing signal and for reading out data of the first-in first-out buffer according to the second external timing signal, the automatic testing device is used for generating the testing signal, the first external timing signal and the second external timing signal and locking the data of the first-in first-out buffer according to the second external timing signal.
Owner:SUNPLUS TECH CO LTD

Detecting device for stored image data in digital camera

The invention relates to a detecting device for stored image data in digital camera. The device comprises an information organizing device and a data analyzing device; the information organizing device comprises a device for generating frame information according to the collected image data, and a device for overlying the generated frame information and the image data and writing into a storage file; the data analyzing device comprises a device for reading information from the storage file, a device for calculating the frame information according to the read stored image data, and a device for comparing the calculated and obtained frame information with the frame information in the storage file and outputting an image data detection result report. The invention can detect whether the stored image data lose frames or not by comparing the calculated frame information with the frame information in the storage file, thus effectively detecting the stability of an image storage system with strong practicability.
Owner:CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI

Method for judging spring grouping ring topology stability

This invention relates to a judgment method for stability of spring packet ring topology including the following steps: a topology timing module sends test information of topology stability to a topology information receiving and processing module in every other period of time, which calls a state test machine of the stability of topology to process it to compute the CRC value of the current topology list and compare with the CRC value of the last period to judge if the topology has changed, which can test the stability topology of spring packet ring effectively.
Owner:SHANGHAI MUNICIPAL ELECTRIC POWER CO

Quality detection method for traditional Chinese medicine preparation for strengthening foundation and improving eyesight

The invention discloses a quality detection method for a traditional Chinese medicine preparation for strengthening foundation and improving eyesight, and belongs to the technical field of medicine. According to the quality detection method disclosed by the invention, the existing quality standards for the preparation for strengthening foundation and improving eyesight are correspondingly improved, identification for safflower carthamus, eugenol and myrobalan is added on the basis of the original standards, and a measurement item for the content of hydroxysafflor yellow A in the main medicine, namely, safflower carthamus in the preparation is added, so that the quality and stability of the preparation can be effectively detected. The improved quality standards can be used for effectively detecting the quality of the product, and really reflecting the safety, effectiveness and controllable quality of the medicine, thus guaranteeing the clinical efficacy of the medicine, and the body health of a vast number of patients.
Owner:JINHE TIBETAN MEDICINE

Hydraulic support testing device

The invention relates to the technical field of hydraulic support testing and discloses a hydraulic support testing device for simulating operating conditions of an inclined coal seam and detecting tilting and slipping prevention performances, stability and reliability of a hydraulic support in the inclined coal seam. The hydraulic support testing device comprises carrier roller devices, roller discs and a body frame, the carrier roller devices are fixedly arranged on a foundation, the roller discs are rotationally mounted on the carrier roller devices, and the body frame is arranged on lateral sides of the roller discs. The body frame comprises a base, a top beam and vertical columns, wherein the base is fixedly connected with the roller discs, the top beam is fixedly connected with the roller discs, and the vertical columns are connected between the base and the top beam. The hydraulic support testing device further comprises a moving platform, guide rails and a loading platform, wherein the moving platform is in slide connection with the vertical columns, the guide rails are arranged on the moving platform and perpendicular to the vertical columns, the loading platform is in slide connection with the guide rails, and a testing space for hydraulic supporting testing is formed between the loading platform and the base. By the technical scheme, a tested hydraulic support can berotated to a tilting angle corresponding to the inclined coal seam, and complex loading of the hydraulic support is realized.
Owner:CCTEG CHINA COAL RES INST

Test method of network connection stability and apparatus thereof

The invention discloses a test method of network connection stability and an apparatus thereof. The method comprises the following steps of under a data transmission state, carrying out data transmission condition detection and acquiring a data transmission information statistics table, wherein the data transmission information statistics table records a time point and data transmission information corresponding to the time point; according to the data transmission information statistics table, determining an interruption time quantum of network connection interruption; and according to the interruption time quantum, determining stability of network connection. In the technical scheme, the interruption time quantum of network connection interruption can be automatically determined and network connection stability of a terminal is determined too; and operation of a test person is reduced and convenience is brought for the test person.
Owner:BEIJING XIAOMI MOBILE SOFTWARE CO LTD

Air traffic control voice multi-channel automatic test system

The invention provides an air traffic control voice multi-channel automatic test system. The system comprises a hardware control box, test software, a radio comprehensive tester, an interface card anda test computer. The test computer is provided with application software and a radio comprehensive tester driving program. By means of an advanced R&S CMA180 radio comprehensive tester and matched software and hardware which are independently researched and developed, the system can be applied to automatic testing of voice channels of equipment such as an air traffic control interphone and avery high frequency radio station, breaks through a limitation that conventional voice testing mainly aims at a single seat, a single channel and single equipment, can be expanded to 10 channels to the maximum extent, reduces human intervention, and improves test accuracy, reliability and working efficiency. Configuration can be selected according to equipment characteristics, more abundant test means are provided, safe and reliable operation of the air traffic control ground-air communication equipment is effectively guaranteed, and a high application value and economic benefits are achieved.
Owner:GUANGZHOU ZHONGNAN CIVIL ATC TECH EQUIPENG

Multi-performance detection device for hot melt adhesive

The invention relates to a multi-performance detection device for a hot melt adhesive, which comprises a base, a placing plate is installed on the base, and a book with a spine facing upwards and pages facing downwards is placed on the upper end face of the placing plate; a detection assembly is arranged on one side of the placing plate and comprises a support located on one side of the placing plate, an arc-shaped plate capable of vertically moving relative to the support is installed on the upper end face of the support, the middle of the arc-shaped plate protrudes upwards, an opening is formed in the arc-shaped plate, a second air cylinder is installed on the support, and a horizontal plate is installed on a telescopic rod at the top of the second air cylinder. A vertical third air cylinder is installed on the horizontal plate, a vertical first clamping plate is installed on a telescopic rod at the top of the third air cylinder, a second clamping plate which is located on one side of the first clamping plate and used in cooperation with the first clamping plate is installed on the support, and first sensors used for clamping the tensile strength of a book page are arranged on the first clamping plate and the second clamping plate. The device has the effect of improving the book gluing strength detection efficiency.
Owner:靖江市金马胶粘制品制造有限公司

Measuring system of film pressure sensor

The invention discloses a measuring system of a thin film pressure sensor, which comprises a box body and four supporting legs, the four supporting legs are respectively and fixedly connected to four corners of the lower surface of the box body, a positioning mechanism is arranged at the central position of the lower surface of the box body, and a pressing mechanism is arranged at the top end of an inner cavity of the box body; the positioning mechanism comprises a supporting plate which is fixedly connected to the center position of the lower surface of the box body; and the plurality of sockets are installed on the outer side of the upper surface of the supporting plate at equal intervals in the circumferential direction, and the sockets are electrically connected with the thin film pressure sensor detector. According to the invention, batch positioning of the film pressure sensors is realized, simultaneous detection of a plurality of film pressure sensors can be realized, time and labor are saved, the detection efficiency is improved, the use stability of the film pressure sensors at the limiting temperature can be detected, the film pressure sensors can be detected in an omnibearing manner, and the probability of faults in the use process is avoided.
Owner:朱小明

An integrated device for spindle error correction and detection of CNC machine tools

The invention discloses a spindle error correction and detection integrated device of a numerical control machine tool. The spindle error correction and detection integrated device comprises a workbench. A correction assembly is mounted on one side of the top end of the workbench. A slag removal mechanism is mounted at the bottom end of the correction assembly. The spindle error correction and detection integrated device is scientific and reasonable in structure and safe and convenient to use; the correction assembly is arranged, through the action of a correction chamber, a four-claw chuck, amilling cutter fixing block and a milling cutter head, measurement of milling can be worked out conveniently according to the measured unbalance amount, and therefore the unbalance amount can be removed precisely; through the action of a sliding groove, a transverse sliding block and a longitudinal sliding block, the milling cutter head can move conveniently in two dimensions, and the unbalance amount of different planes of a spindle is removed; the slag removal assembly is arranged, and through the action of a filter plate and a funnel, waste generated during milling can be conveniently collected and cleared away; through the action of a suction pipe, waste can enter the filter plate and the funnel conveniently through suction force, and therefore the clearing rate of the waste is increased; and operation is simple, and use is convenient.
Owner:JILIN TEACHERS INST OF ENG & TECH

IED logic states real-time response capacity detecting method based on physical layer information

ActiveCN103929338ADetectable rapidityDetectable stabilityTransmission monitoringData switching networksTime responseDisplay response
The invention provides an IED logic states real-time response capacity detecting method based on physical layer information, and relates to supplement and improvement on a communication port part included in a traditional IED real-time response accuracy detecting method. The IED logic states real-time response capacity detecting method based on physical layer information is based on physical demonstrability and traceability, the correlation mode between data frame simulation / analysis, a physical layer signal of a data frame, a pulse labeling signal of the physical layer signal and the like is adopted, an oscilloscope is combined to display response characteristics of a signal between IED ports, and the accuracy, rapidity, stability and other capacities of IED logic states real-time response can be detected. The IED logic states real-time response capacity detecting method is based on a network communication physical layer and can be used for detecting IEDs meeting IEC61850 or IEC60870-5-103 or other data exchange standards.
Owner:STATE GRID CORP OF CHINA +2

A kind of aerodynamic test system and test method of automobile frame

The invention relates to an automobile frame aerodynamics test system and a test method. The automobile frame aerodynamics test system comprises a test base, a supporting device, a locking device anda fan, wherein a square groove is arranged on a middle portion of the test base; the outer end of the square groove of the test base is symmetrically provided with an arc groove; the front side wall of the square groove on the test base is provided with a controller; the square groove of the test base is internally provided with the supporting device; the top part of the supporting device is provided with the locking device; the fan is mounted at the right top part of the test base; and the supporting device comprises a rotating motor, a rotating supporting plate, a rotating sliding column, aguiding cylinder, a guiding mechanism, a supporting cylinder, a supporting connecting plate and a detecting mechanism. The problems that when the existing frame is subjected to aerodynamics test, different types of frames can not be locked, the frame placing position needs to be adjusted and put straight manually, multi-angle aerodynamics test on the frame can not be carried out, detection of theframe aerodynamics test is inaccurate and the like can be solved.
Owner:苏州郅荣软件有限公司

Equipment and method for detecting performance of automotive electronic thermal insulation material

The invention provides performance detection equipment and a detection method for an automobile electronic heat insulation material, and relates to the field of material performance detection.The performance detection equipment comprises an adjusting mechanism and a detection mechanism, the heat insulation material is placed in an inner cavity of an assembly ring, and the fit degree of the device to the heat insulation material is increased through shrinkage of the distance of the whole device; air blowing is carried out to an inner cavity of an inner rotating rod, air blows the side end of a heat insulation material, air speed detection mechanisms are installed at the two ends of the inner rotating rod, reverse impact wind power is generated when the air blows to the side end of the heat insulation material when the air blows to the inner end, and the air permeability of the heat insulation material is judged by capturing the air speed of the air. By pressing the side end of the mounting disc, the middle connecting transverse cylinder is pushed towards the side end, the assembling column is matched with the inner connecting disc, the steps are repeated, the first adjusting mechanism generates airflow differential change, and the stability of the heat insulation material under the airflow differential condition is detected.
Owner:魏玉莲

Test method for aircraft gimbal stability based on digital camera

The invention discloses an aircraft holder stability testing device and an aircraft holder stability testing method based on a digital camera. A fixed bracket is arranged on the periphery of an aircraft, the top part of the aircraft is fixed to the lower end of a supporting rod through a universal joint and is positioned at the center of the fixed bracket, an oilcloth is horizontally arranged at the bottom surface of a frame of the fixed bracket, a logo image is arranged on the oilcloth, the digital camera is in rigid connection with a body of the aircraft, and the aircraft and the digital camera are connected with a PC upper computer on the ground through a picture data transmission system; and the digital camera is calibrated firstly, a relation between a pixel position of an image of the digital camera and a logo point position on the oilcloth is established, the fixed bracket and the oilcloth are kept in parallel to the ground horizontally in flight, exterior orientation parameters are obtained through processing picture data acquired in real time, and the stability result of an aircraft holder is obtained through variance calculation. The aircraft holder stability testing device adopts the scientific and effective aircraft holder stability testing method for detection stability of the aircraft holder, is simple and reasonable in structure, high in universality and convenient to disassemble, and can be suitable for various kinds of aircraft holders.
Owner:CHINA JILIANG UNIV

Method for testing the mechanical stability of emulsions

ActiveCN103645283BChecking Mechanical StabilityDetection stabilityMaterial analysisEmulsion testHeat resistance
The invention relates to a method for detecting the mechanical stability and other properties of an emulsion. The method is as follows: ① put the emulsion to be tested in a dispersing tank; After adding the dispersant, wetting agent, defoamer and heavy calcium into the dispersing tank in sequence, increase the speed of the dispersing machine to 2000-2500r / min, and disperse for 10-20min; ③After that, add film-forming aids and continue dispersing for 10-15min; ④ Observe the system obtained by dispersion. If the system does not gel, it means that the emulsion to be tested has good mechanical stability, calcium ion stability and heat resistance; if the system gels, it means that the emulsion to be tested has mechanical stability, calcium ion Poor ion stability and heat resistance; in each step, the weight ratio of each detection raw material is as follows: 190-210 parts of emulsion to be tested, 5.0-6.0 parts of dispersant, 1-1.5 parts of wetting agent, and 1.5 parts of defoamer -2.5 parts, heavy calcium 400-450 parts, film-forming aid 15-20 parts; the invention can not only detect the mechanical stability of the emulsion quickly and conveniently, but also can detect the calcium ion stability and heat resistance of the emulsion.
Owner:SKSHU PAINT

Spindle error correction and detection integrated device of numerical control machine tool

The invention discloses a spindle error correction and detection integrated device of a numerical control machine tool. The spindle error correction and detection integrated device comprises a workbench. A correction assembly is mounted on one side of the top end of the workbench. A slag removal mechanism is mounted at the bottom end of the correction assembly. The spindle error correction and detection integrated device is scientific and reasonable in structure and safe and convenient to use; the correction assembly is arranged, through the action of a correction chamber, a four-claw chuck, amilling cutter fixing block and a milling cutter head, measurement of milling can be worked out conveniently according to the measured unbalance amount, and therefore the unbalance amount can be removed precisely; through the action of a sliding groove, a transverse sliding block and a longitudinal sliding block, the milling cutter head can move conveniently in two dimensions, and the unbalance amount of different planes of a spindle is removed; the slag removal assembly is arranged, and through the action of a filter plate and a funnel, waste generated during milling can be conveniently collected and cleared away; through the action of a suction pipe, waste can enter the filter plate and the funnel conveniently through suction force, and therefore the clearing rate of the waste is increased; and operation is simple, and use is convenient.
Owner:JILIN TEACHERS INST OF ENG & TECH

An electro-hydraulic power steering pump controller detection system

An embodiment of the present application provides an electrohydraulic power steering pump controller detection system, the system includes a hydraulic circuit for supplying oil to the steering pump and an electrical control circuit, and the hydraulic circuit includes a cooling system circuit, a heating system circuit, and an electrical control circuit. For the oil supply circuit that supplies oil to the steering pump, the electrical control circuit includes a power supply, a DC power supply that is electrically connected to the power supply in turn, and a steering pump controller. The steering pump motor is controlled by the steering pump controller, and produces a series of actions in a certain hydraulic working environment. By collecting the feedback data from the steering pump motor, the stability and reliability of the steering pump controller can be detected.
Owner:NANJING YUEBOO POWER SYST CO LTD

Method for Contamination Monitoring

A method of evaluating a fluid from a subterranean formation drawn into a downhole tool positioned in a wellbore penetrating the subterranean formation is provided. This method involves drawing fluid from a formation into a flowline, measuring at least one property of the fluid in the flowline and detecting stabilization of the property or properties of the fluid in the flowline. An electrochemical sensor for measuring contents of a fluid or gas at high pressure and / or high temperature may be used.
Owner:SCHLUMBERGER TECH CORP

A Stability Detection Method of Thermal Control Focusing Mechanism

The invention discloses a method for detecting the stability of a thermally controlled focusing mechanism, which uses a secondary mirror mounted on the focus ring as the first reflecting mirror, or replaces the secondary mirror with a plane mirror and installs it on the focus ring as the first reflecting mirror. reflector, and set a standard mirror and an interferometer sequentially on the same optical axis as the incident light direction of the first reflector, so that the parallel monochromatic light emitted by the interferometer is reflected by the standard mirror to form a reference light, which is reflected by the first reflector The above-mentioned reference light interferes to form interference fringes; by adjusting the first mirror, the interference fringes are minimized or disappeared; The conditions of interference fringes after temperature are compared to determine the stability of the deformation of the focus ring during the focusing process. The invention can detect the stability of the deformation amount of the focus ring during the focus adjustment process, so as to ensure effective focus adjustment without fatal influence on the image quality.
Owner:AEROSPACE INFORMATION RES INST CAS

Method for judging spring grouping ring topology stability

This invention relates to a judgment method for stability of spring packet ring topology including the following steps: a topology timing module sends test information of topology stability to a topology information receiving and processing module in every other period of time, which calls a state test machine of the stability of topology to process it to compute the CRC value of the current topology list and compare with the CRC value of the last period to judge if the topology has changed, which can test the stability topology of spring packet ring effectively.
Owner:SHANGHAI MUNICIPAL ELECTRIC POWER CO

Stability detection method for thermal control focusing mechanism

The invention discloses a stability detection method for a thermal control focusing mechanism. A secondary mirror installed on a focusing ring serves as a first reflecting mirror, or a plane mirror instead of the secondary mirror is installed on the focusing ring to serve as the first reflecting mirror, and a standard mirror and an interferometer are sequentially arranged in the same optical axis in the incident light direction of the first reflecting mirror, so that parallel monochromatic light emitted by the interferometer is reflected by the standard mirror to form reference light, and after being reflected by the first reflecting mirror, the light is interfered with the reference light to form interference fringes; the interference fringes are minimized or disappear by adjusting the first reflecting mirror; and then heating and cooling are repeatedly carried out through temperature control equipment for multiple times, and the stability of the deformation of the focusing ring in the focusing process is determined by comparing the initial state, the interference fringe condition after each time of cooling and the interference fringe condition after each time of heating. According to the invention, the stability of the deformation of the focusing ring in the focusing process can be detected, effective focusing is ensured, and fatal influence on the imaging quality is avoided.
Owner:AEROSPACE INFORMATION RES INST CAS

Thickness detection stability detection method for wafer edge metrology and inspection tools

The invention discloses a thickness and stability detection method of a wafer edge measuring and detection tool, wherein the method comprises the following steps that a wafer edge removing process is completed on a standard piece; the standard piece is scanned and detected for a plurality of times through the wafer edge measuring and detection tool, and a first value combination is worked out and comprises a first maximum value and a first value; the mean value of the first value combination is respectively calculated, and a first mean value of each combination is worked out; an arithmetic mean value is calculated through the first maximum value, a first minimum value and the first mean value; daily scanning is carried out to the standard piece, a second value combination is worked out, and the absolute difference between the arithmetic mean value and a second maximum value, a second minimum value and a second mean value in the second value combination is respectively calculated; and a standard value is set, and the absolute difference and the standard value are respectively compared. According to the thickness and stability detection method of the wafer edge measuring and detection tool, the stability and the precision for a machine to detect edge bead rinse (EBR) / wafer edge exposure (WEE) can be detected more intuitively through the deviation.
Owner:SHANGHAI HUALI MICROELECTRONICS CORP
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