A Stability Detection Method of Thermal Control Focusing Mechanism
A detection method and stability technology, applied in the field of stability detection of thermal control focusing mechanism, can solve the problems of lack of detection method and image quality influence, and achieve the effect of ensuring effective focusing
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[0031] (1) The first mirror 2 may be a secondary mirror, can also be a planar mirror, but the secondary mirror is generally spherical or aspherical, not easy to measure, so the first mirror 2 is preferably a flat mirror.
[0032] (2) The standard mirror 3 is a transmission standard mirror, which will also be reflected while transmitting, and the reflection of the transmission standard mirror interferes with the reflection of the first mirror 2.
[0033] (3) The interferometer may employ a zygo interferometer, or other brands of interferometers can be used.
[0034](4) By adjusting the first mirror 2, so that the interference fringes are minimal or disappear, which is related to the face shape of the first mirror 2, the first mirror 2 face type is very good, there may be no stripes, if the first mirror 2 face type is not good, there may be ring stripes. In practical applications, the entire structure of the focusing ring 1 may be placed on the five-dimensional adjustment table of t...
Embodiment 1
[0047] as Figure 1 As shown, a stability detection method for thermally controlled focusing mechanisms, including the following steps:
[0048] Step A1, the sub-mirror mounted on the focusing ring 1 in the thermal control focusing mechanism as the first mirror 2, the incident light direction of the first mirror 2 is set in the same optical axis as the standard mirror 3 and the interferometer 4, so that the parallel monochromatic light emitted by the interferometer 4 is reflected by the standard mirror 3 to form a reference light, after reflection of the first mirror 2 and the reference light interference, the interference fringe is formed; By adjusting the first mirror 2, so that the interference fringes are minimized or disappeared, the temperature of the thermal control focusing mechanism at this time is 20 ° C, the temperature is recorded as the initial temperature, the interference fringe conditions observed from the interferometer field of view at this time, such as Figure 2 ...
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